A new 64-cell NAND flash memory with asymmetric S/D (Source/Drain) structure for sub-40nm node technology and beyond has been successfully developed. To suppress short channel effect in NAND memory cell, asymmetric S/D consisting of optimized junction and inversion layer induced by fringe field of WL bias which is applied at NAND operation conditions is successfully utilized. 64-cell NAND string which is double number of cells used in current NAND string is also used to further reduce bit cost by achieving over 10% chip size reduction while almost maintaining MLC (Multi-Level-Cell) NAND performance requirements.
In order to develop high density NAND Flash device, the increased number of cell strings for 1 pag e buffer f orces to _ form a long bit-line with low sheet resistance, as well as low SitD parasitic capacitance between bit-lines. In this paper, we D secured a copper damascene process to form 38nm bit-lines(1) Photo Resist patterning with 76nm pitch using SADP (Self-Aligned Double Patterning) process. The methods to minimize the sheet resistance and to suppress the parasitic capacitance were explained on NAND Flash device with 38nm node technology.
Ultrasonic non-destructive testing is an effective means of examining objects without destroying them. Among such testing, ultrasonic nonlinear evaluation is used to detect micro-damage, such as corrosion or plastic deformation. In terms of micro-damage evaluation, the data that comes from amplitude comparison in the frequency domain plays a significant role. Its technique and parameter are called ultrasonic nonlinear technique and nonlinearity. A certain portion of nonlinearity comes from the equipment system, while the other portion of nonlinearity comes from the material. The former is system nonlinearity, while the latter is material nonlinearity. System nonlinearity interferes with interpretation, because its source is not from the material. In this study, in order to minimize system effects, a mixing technique is implemented. To use the large area inspection ability of the guided wave, the main research issue in this paper is focused on the guided wave mixing technique. Moreover, several bulk wave mixing theory equations become good concepts for guided wave mixing theoretical study, and the conventional nonlinear technique and guided wave mixing experimental results are compared in this study to confirm the reliability. This technique can play an important role in quantitatively discriminating fine damage by minimizing the nonlinearity of the equipment system.
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