In this paper we present a new fabrication method that combines for the first time popular SU-8 technology and PerMX dry-photoresist lamination for the manufacturing of high aspect ratio three-dimensional multi-level microfluidic networks. The potential of this approach, which further benefits from wafer-level manufacturing and accurate alignment of fluidic levels, is demonstrated by a highly integrated three-level microfluidic chip. The hereby achieved network complexity, including 24 fluidic vias and 16 crossing points of three individual microchannels on less than 13 mm 2 chip area, is unique for SU-8 based fluidic networks. We further report on excellent process compatibility between SU-8 and PerMX dryphotoresist which results in high interlayer adhesion strength. The tight pressure sealing of a fluidic channel (0.5 MPa for 1 h) is demonstrated for 150 lm narrow SU-8/PerMX bonding interfaces.

Highly aspheric reflective micro-optics for the generation of quasi-nondiffracting beams are of great interest for a wide variety of applications. However, up to now it was impossible to fabricate tunable arrays of these elements. In this Letter, we demonstrate the first array of purely reflective tunable microelectromechanical systems (MEMS) microaxicon mirrors with a conical shape and a continuous surface. The actuation is achieved by thermal expansion in a solid state design and the tuning range allows for large conical angles and is able to form concave as well as convex axicons. The deflection of the mirror surface and the propagation of the resulting quasi-Bessel beams have been characterized to prove the functionality of the device.

Novel types of reflective spiral micro-electro-mechanical systems were used to generate few-cycle vortex pulses of variable topological charge from a Ti:sapphire laser oscillator. The phase profile of these components was controlled by varying the temperature. The temporal properties of the pulses were characterized with spatially resolved nonlinear autocorrelation. The beam structure resembles a slightly distorted Laguerre-Gaussian distribution. The different topological charges were indicated by detecting Poynting-vector maps with a programmable Shack-Hartmann sensor of enhanced angular sensitivity.

We present the first tunable v-shaped mirror, also known as Fresnel mirror, that may be used to generate a quasi-nondiffracting line pattern, for example for applications in laser lithography or nanomachining with femtosecond lasers. The aperture of the device is 5 mm with a surface flatness of better than λ/10, and the range of the tilting angle is 1.3–38 mrad, resulting in a fringe spacing of 123 μm down to 4.2 μm for red light at 633 nm. In contrast to usual cantilever-comb setups, the mirrors are supported on a PDMS layer and tilted by a single piezoelectric actuator, providing a high resonance frequency of 5.1 kHz. The device is fabricated using laser rapid prototyping of silicon and a casting processes of soft polymers. We show the static and dynamic characterization of the mirror and the verification of the optical functionality.

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Adaptive autocorrelation with an angular tunable micro-electro-mechanical system is reported. A piezo-actuated Fresnel bi-mirror structure was applied to measure the second order autocorrelation of near-infrared few-cycle laser pulses in a non-collinear setup at tunable superposition angles. Because of enabling measurements with variable scaling and minimizing the influence of distortions by adaptive self-reconstruction, the approach extends the capability of autocorrelators. Flexible scaling and robustness against localized amplitude obscurations are demonstrated. The adaptive reconstruction of temporal frequency information by the Fourier analysis of autocorrelation data is shown. Experimental results and numerical simulations of the beam propagation and interference are compared for variable angles.

For a growing number of applications in nonlinear spectroscopy, micro-and nano-machining, optical data processing, metrology or medicine, an adaptive shaping of ultrashort pulsed, ultrabroadband laser beams into propagation-invariant linear focal zones is required. One example is the femtosecond laser high-speed large area nanostructuring with moving substrates and cylindrical optics we reported about recently. Classical microoptical systems, however, distort the temporal pulse structure of few cycle pulses by diffraction and dispersion. The temporal pulse transfer can be improved with innovative types of reflective MEMS axicons based on two integrated rectangular mirrors tilted by piezo-actuators. In contrast to pixelated liquid-crystal-on-silicon (LCoS) based devices, cutoff frequencies in multi-kilohertz range, a purely reflective setup and continuous profiles with larger phase shift are realized which enable for shaping extended propagation-invariant zones at a faster and more robust operation. Additionally, a fixed phase offset can be part of the structure. Here, the performance of a prototype of linear mechanically tunable MEMS axicon is demonstrated by generating a pseudo-nondiffracting line focus of variable diameter and depth extension from a femtosecond laser pulse. The temporal transfer of 6-fs pulses of a Ti:sapphire laser oscillator is characterized with spectral phase interferometry for direct electric-field reconstruction (SPIDER) and spatially resolved nonlinear autocorrelation. Spatial and temporal self-reconstruction properties were studied. The application of the flexible focus to the excitation of plasmon-polaritons and the self-organized formation of coherently linked deep sub-wavelength laser-induced periodic surface structures (LIPSS) in semiconductors and dielectrics is reported.