In-plane DEAP stack actuators for optical MEMS applications

Brunne, Jens; Kazan, Samar; Wallrabe, Ulrike

doi:10.1117/12.880232

Cited by 5 publications

(8 citation statements)

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“…Table 4 shows the conductivities that can be achieved with MWCNTs. The highest value found for MWCNT-PDMS was 35 Sm −1 at a loading of 12 wt% [ 15 ]. The values depend strongly on the dispersion method and the aspect ratio of the MWCNTs used.…”

Section: Resultsmentioning

confidence: 99%

“…To avoid agglomerates and to achieve a good dispersion of the PTFE when stirring the mixture, high shear forces are needed. In this work, a custom-made mixing head [ 15 ] was used to stir at 2000 rpm for 30 min, leading to a high degree of dispersion when the PTFE powder is ground up between the mixing head and the walls of the mixing beaker. Figure 1 shows microscopic images of PS/PTFE solutions mixed for different time periods.…”

Section: Fabricationmentioning

confidence: 99%

“…C-PDMS. To prepare the C-PDMS, ENASCO 250 P (TIMCAL Ltd., Bodio, Switzerland) was used as filler, as it showed a good conductivity for the lowest loading among all the carbon blacks we tested [ 15 ]. To avoid clogging the mixer, the base elastomer was mixed in a 1:1 weight ratio from its two components and mixed with 10.6 wt% carbon black, along with n -heptane as a solvent, until the desired viscosity was reached.…”

Section: Fabricationmentioning

confidence: 99%

“…To avoid clogging the mixer, the base elastomer was mixed in a 1:1 weight ratio from its two components and mixed with 10.6 wt% carbon black, along with n -heptane as a solvent, until the desired viscosity was reached. The mixture was then stirred with a custom-designed mixing head [ 15 ] at 2000 rpm for 15 min. To avoid premature curing during mixing, it was cooled in an ice water bath.…”

Section: Fabricationmentioning

confidence: 99%

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Highly elastic conductive polymeric MEMS

Ruhhammer

Zens

Goldschmidtboeing

et al. 2015

Science and Technology of Advanced Materials

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Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which can be embedded into a matrix that undergoes large deformations. Conductive polydimethylsiloxane (PDMS) is a suitable candidate but is still challenging to fabricate. Conductivity is achieved by filling a nonconductive PDMS matrix with conductive particles. In this work, we present an approach that uses new mixing techniques to fabricate conductive PDMS with different fillers such as carbon black, silver particles, and multiwalled carbon nanotubes. Additionally, the electrical properties of all three composites are examined under continuous mechanical stress. Furthermore, we present a novel, low-cost, simple three-step molding process that transfers a micro patterned silicon master into a polystyrene (PS) polytetrafluoroethylene (PTFE) replica with improved release features. This PS/PTFE mold is used for subsequent structuring of conductive PDMS with high accuracy. The non sticking characteristics enable the fabrication of delicate structures using a very soft PDMS, which is usually hard to release from conventional molds. Moreover, the process can also be applied to polyurethanes and various other material combinations.

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Section: Resultsmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

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Highly elastic conductive polymeric MEMS

Ruhhammer

Zens

Goldschmidtboeing

et al. 2015

Science and Technology of Advanced Materials

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“…Then both compositions are combined and mixed for about 3 minutes. The 2-component silicone Silbione RTV 4420 was chosen due to its tear behavior as evaluated in [Bernardi et al 2017] and the Imerys Enasco 250 P carbon black as suggested in [Brunne et al 2011]. Dielectric layer: Same as the protective layer.…”

Section: A Silicone Mixturesmentioning

confidence: 99%

Deformation Capture via Soft and Stretchable Sensor Arrays

et al. 2019

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Fig. 1. Left to right: We propose a method for the fabrication of soft and stretchable silicone based capacitive sensor arrays. The sensor provides dense stretch measurements that, together with a data-driven prior, allow for the capture of surface deformations in real-time and without the need for line-of-sight.We propose a hardware and software pipeline to fabricate flexible wearable sensors and use them to capture deformations without line of sight. Our first contribution is a low-cost fabrication pipeline to embed multiple aligned conductive layers with complex geometries into silicone compounds. Overlapping conductive areas from separate layers form local capacitors that measure dense area changes. Contrary to existing fabrication methods, the proposed technique only requires hardware that is readily available in modern fablabs. While area measurements alone are not enough to reconstruct the full 3D deformation of a surface, they become sufficient when paired with a data-driven prior. A novel semi-automatic tracking algorithm, based on an elastic surface geometry deformation, allows to capture ground-truth data with an optical mocap system, even under heavy occlusions or partially unobservable markers. The resulting dataset is used to train a regressor based on deep neural networks, directly mapping the area readings to global positions of surface vertices. We demonstrate the flexibility and accuracy of the proposed hardware and software in a series of controlled experiments, and design a prototype of wearable wrist, elbow and biceps sensors, which do not require line-of-sight and can be worn below regular clothing.

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