Aluminum nitride thin films have been grown epitaxially on Si(111) substrates, for the first time, by pulsed laser ablation of sintered AlN target. The influence of process parameters such as laser energy density, substrate temperature, pulse repetition rate, nitrogen partial pressure, etc. on epitaxial growth has been investigated to obtain high quality AlN films. These films were characterized by Fourier transform infrared spectroscopy, Raman spectroscopy, x-ray diffraction (Θ and ω scans) technique, high resolution transmission electron microscopy, and scanning electron microscopy. The films deposited at laser energy density in the range of 2–3 J/cm2, substrate temperature of 750 °C, and base pressure of 3×10−7 Torr are single phase and highly oriented along c axis normal to the Si(111) planes. The results of x-ray diffraction and electron microscopy on these films clearly show the epitaxial growth of the AlN films with an orientational relationship of AlN[0001] ∥ Si[111] and AlN[21̄1̄0] ∥ Si[011̄]. The AlN/Si interface was found to be quite sharp without any indication of interfacial reaction. Laser physical vapor deposition is shown to produce high quality epitaxial AlN films with smooth surface morphology when deposited under optimized conditions.
Leakage currents in high-quality pulsed-laser deposited aluminum nitride on 6H silicon carbide from 25 to 450°C
A laser method based upon carbon ion implantation and pulsed laser melting of copper has been used to produce continuous diamond thin film. Carbon ions were implanted with ion energies in the range of 60 to 120 keV, and doses of 1.0 x 10(18) to 2.0 x 10(18) ions cm(-2). The ion-implanted specimens were treated with nanosecond excimer laser pulses with the following parameters: energy density, 3.0 to 5.0 J cm(-2); wavelength, 0.308 microm; pulse width, 45 nanoseconds. The specimens were characterized with scanning electron microscopy (SEM), x-ray diffraction, Rutherford backscattering/ion channeling, Auger, and Raman spectroscopy. The macroscopic Raman spectra contained a strong peak at 1332 cm(-1) with full width at half maximum of 5 cm(-1), which is very close to the quality of the spectra obtained from single-crystal diamond. The selected area electron diffraction patterns and imaging confirmed the films to be defect-free single crystal over large areas of up to several square micrometers with no grain boundaries. Low voltage SEM imaging of surface features indicated the film to be continuous with presence of growth steps.
This paper presents the role of basin-edge geometry in the generation of surface waves using 2.5-D modelling. The simulated responses of various basin-edge models revealed surface wave generation near the basin edge and their propagation normal to the edge. Seismic responses of basin-edge models using different fundamental frequency of soil along with spectral analysis of differential ground motion confirmed that surface waves start generating near the basin edge when body-wave frequency exceeds the fundamental frequency of soil. Spectral analysis of differential ground motion also confirmed the generation of high frequency surface wave. An increase of surface-wave amplitude with soil thickness was obtained. Large ground displacement observed near the basin edge may be due to the interference of surface/diffracted waves with the direct waves and their multiples. The effect of edge roughness on the surface-wave characteristics was found to be negligible as compared with the edge geometry. Simulated results revealed a decrease of surface-wave amplitude with edge slope, particularly in the case of surface waves caused by S waves. Surface wave generation near the basin edge was obtained for all four considered angles of incidence. At the same time, it was also inferred that the characteristics of these surface waves depend on the angle of incidence to some extent. The findings of this paper reveal that basin-edge effects deserve a particular attention for the purpose of earthquake-resistant design and seismic microzonation.
Chemical-vapor deposition of diamond on transition-metal substrates of Cu, Ni, Fe, and their alloys NiAl, Ni3Al, FeSi2, and FeSi has been investigated. It is shown that diamond grows easily on Cu with a very small amount of graphite, while on Ni and Fe there is rapid growth of the graphite layer before diamond deposition. The formation of graphite is attributed to the decomposition of carbon-containing precursors due to the strong catalytic reactivity of Ni and Fe substrates with carbon. The deactivation of these substrates by forming NiAl and FeSi2 results in the suppression of graphite and formation of high-quality diamond. However, for Ni3Al and FeSi substrates which are not completely deactivated, deposition of graphite still takes place. A mechanism based on the electronic structure of substrate atoms, particularly on the 3d shell structure of Cu, Ni, and Fe is proposed to understand the above behavior. Requirements for the stabilization of sp3 bonding of carbon on different substrates are discussed.
Summary An algorithm was developed using the 2.5‐D elastodynamic wave equation, based on the displacement–stress relation. One of the most significant advantages of the 2.5‐D simulation is that the 3‐D radiation pattern can be generated using double‐couple point shear‐dislocation sources in the 2‐D numerical grid. A parsimonious staggered grid scheme was adopted instead of the standard staggered grid scheme, since this is the only scheme suitable for computing the dislocation. This new 2.5‐D numerical modelling avoids the extensive computational cost of 3‐D modelling. The significance of this exercise is that it makes it possible to simulate the strong ground motion (SGM), taking into account the energy released, 3‐D radiation pattern, path effects and local site conditions at any location around the epicentre. The slowness vector (py) was used in the supersonic region for each layer, so that all the components of the inertia coefficient are positive. The double‐couple point shear‐dislocation source was implemented in the numerical grid using the moment tensor components as the body‐force couples. The moment per unit volume was used in both the 3‐D and 2.5‐D modelling. A good agreement in the 3‐D and 2.5‐D responses for different grid sizes was obtained when the moment per unit volume was further reduced by a factor equal to the finite‐difference grid size in the case of the 2.5‐D modelling. The components of the radiation pattern were computed in the xz‐plane using 3‐D and 2.5‐D algorithms for various focal mechanisms, and the results were in good agreement. A comparative study of the amplitude behaviour of the 3‐D and 2.5‐D wavefronts in a layered medium reveals the spatial and temporal damped nature of the 2.5‐D elastodynamic wave equation. 3‐D and 2.5‐D simulated responses at a site using a different strike direction reveal that strong ground motion (SGM) can be predicted just by rotating the strike of the fault counter‐clockwise by the same amount as the azimuth of the site with respect to the epicentre. This adjustment is necessary since the response is computed keeping the epicentre, focus and the desired site in the same xz‐plane, with the x‐axis pointing in the north direction.
We have theoretically and experimentally investigated the thermal effects of targets evaporated by nanosecond laser pulses. The subsurface temperatures were calculated to be higher than the surface temperatures during planar surface evaporation of the target material. While the evaporating surface is being cooled due to the latent heat of vaporization, subsurface superheating occurs due to a finite absorption depth of the laser beam. The temperature profiles of silicon targets irradiated by nanosecond laser pulses were determined by solving the one-dimensional heat flow equation using an implicit finite difference method. The subsurface superheating increased at higher energy densities, and decreased with increasing absorption coefficient of the material. This internal heating of the target during pulsed laser irradiation can be correlated with the explosive removal of material from the target. This may lead to deposition of small particles on films fabricated by the pulsed laser evaporation technique.
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