We have demonstrated that the sequential lateral solidification (SLS) technology can be utilized for the large area AMOLED. An optimized SLS process provides us with polycrystalline Si films with well‐controlled grain size and location. The thin film transistors (TFTs) with SLS‐processed Si films show high performance with desirable uniformity. 14″ WXGA (1280×RGB×768) AMOLEDs were fabricated with SLS‐processed TFT backplanes. We utilized RGB evaporation process with fine metal mask. The novel delta pixel arrangement results in increased aperture ratio and wider FMM process window. The advantage of SLS process will be discussed.

We have demonstrated that the single crystalline silicon films on the glass substrates can be utilized in the conventional mass production lines. The single crystalline Si layers were transferred to the 370 mm x 470 mm glass substrates using Silicon-On-Glass (SiOG) technology. Using the thin film transistor backplanes made by conventional CMOS technology, 2.4" qVGA AMOLED with integrated circuits were successfully fabricated. A completed 2.4" qVGA AMOLED module shows wide viewing angle (> 170 o ) and 73 % color gamut. The advantages of SiOG technology and its significances will be presented..

We have demonstrated that thin film transistor backplanes for AMOLED could be fabricated with line‐scan sequential lateral solidification (SLS) process. with 4 μm × 730 mm single laser beamlet, directional and two‐shot SLS processes were carried out to make polycrystalline Si films. The geometry for driving TFTs, which can provide sufficient uniformity of TFT performances, is that the source‐drain direction is perpendicular to the grain growth direction. 14″ WXGA (1366×RGB×768) AMOLEDsfor TV application were fabricated by utilizing different TFT geometry for driving TFTs and switching TFTs. The advantages of the line‐scan SLS system are (1) it can provide higher productivity than the conventional laser system and (2) large displays over 50″ can be manufactured without scan overlap area.

An excimer-laser-based two-shot sequential lateral solidification (TS-SLS) process has been developed to fabricate 30" FHD (1920xRGBx1080) AMOLED TVs using both 2D projection and line-scan SLS systems. We have optimized (1) the microstructure of TS-SLS processed polycrystalline materials, (2) the geometry of driving TFTs to minimize non-uniformity of the pixel brightness and (3) the off-bias TFT aging process to reduce the leakage current. This result verifies that the TS-SLS process can be utilized to make large area AMOLED TVs without any laser related mura.