53.2: 30″ AMOLED Based on Sequential Lateral Solidification Process

Abstract

An excimer-laser-based two-shot sequential lateral solidification (TS-SLS) process has been developed to fabricate 30" FHD (1920xRGBx1080) AMOLED TVs using both 2D projection and line-scan SLS systems. We have optimized (1) the microstructure of TS-SLS processed polycrystalline materials, (2) the geometry of driving TFTs to minimize non-uniformity of the pixel brightness and (3) the off-bias TFT aging process to reduce the leakage current. This result verifies that the TS-SLS process can be utilized to make large area AMOLED TVs without any laser related mura.

59.1: Invited Paper: LTPS Backplane Technologies for AMLCDs and AMOLEDs

“…As a result, we successfully optimized the TS-SLS process for the high resolution mobile displays. However, for AMOLED applications, where parallel TFTs with higher mobility and perpendicular TFTs with better uniformity are used for compensation circuits [6], the grain length should be optimized both in 2D and line-scan systems to avoid the crystallization related mura. Fig.6 shows the mobility and the driving range characteristics obtained by the 2D-SLS system with respect to the grain length.…”

P‐81: Thin Beam Laser Crystallization Technology in AMOLED and AMLCD Applications

“…To meet growing market demands and advance the volumeproduction capabilities of displays, next generation laser crystallization process and system are needed. Sequential lateral solidification (SLS) process with thin beam technology was reported for AMOLED demonstrations [7][8]. We focus on ELA process with thin beam technology and related transistor uniformity here.…”