Thin-film resonant absorbers for the far-IR spectral range were fabricated, characterized, and modeled. The 3-μm-thick structure comprises a periodic surface array of metal squares, a dielectric spacer and a metallic ground plane. Up to 95% absorption for the fundamental band at ~53.5μm wavelength (5.6 THz) is achieved experimentally. Absorption bands are independent of the structure period and only weakly dependent on polarization and incident angle. The results are well explained in terms of standing-wave resonances within individual metal-dielectric-metal cavities. The structure has application as a wavelength selective coating for far-IR bolometers.
Fluorine-doped tin oxides (FTO) were investigated for infrared plasmonic applications. Nano-crystalline FTO thin films were grown by the SPEED chemical-spray deposition method. Complex permittivity spectra were measured from 1.6 to 12 μm wavelength. These spectra were used to calculate materials parameters, which compared well with values from transport measurements, and to predict characteristics of surface plasmon polaritons (SPP). Reflectivity spectra for lamellar FTO gratings revealed SPP coupling resonances in good agreement with predictions. The FTO film studied here is well suited for plasmonic applications in the important 3-5 μm wavelength range.
The semimetal antimony, with a plasma frequency ~80 times less than that of gold, is potentially useful as a host for infrared surface polaritons (SPs). Relevant IR SP properties, including the frequency-dependent propagation length and penetration depths for fields into the media on either side of the interface, were determined from optical constants measured on optically-thick thermally-evaporated Sb films over the wavelength range 1 to 40 μm. Plasma and carrier relaxation frequencies were determined from Drude-model fits to these data. The real part of the permittivity is negative for wavelengths beyond 11 μm. Distinct resonant decreases in specular reflected intensity were observed for Sb lamellar gratings in the wavelength range of 6 to 11 μm, where the real part of the permittivity is positive. Both resonance angles and the angular reflectance spectral line shapes are in agreement with theory for excitation of bound surface electromagnetic waves (SPs). Finite element method (FEM) electrodynamic simulations indicate the existence of SP modes under conditions matching the experiments. FEM results also show that such waves depend on having a significant imaginary part of the permittivity, as has been noted earlier for the case of surface exciton polaritons.
A MEMS cantilever IR detector that repetitively lifts from the surface under the influence of a saw-tooth electrostatic force, where the contact duty cycle is a measure of the absorbed IR radiation, is analyzed. The design is comprised of three parallel conducting plates. Fixed buried and surface plates are held at opposite potential. A moveable cantilever is biased the same as the surface plate. Calculations based on energy methods with position-dependent capacity and electrostatic induction coefficients demonstrate the upward sign of the force on the cantilever and determine the force magnitude. 2D finite element method calculations of the local fields confirm the sign of the force and determine its distribution across the cantilever. The upward force is maximized when the surface plate is slightly larger than the other two. The electrostatic repulsion is compared with Casimir sticking force to determine the maximum useful contact area. MEMS devices were fabricated and the vertical displacement of the cantilever was observed in a number of experiments. The approach may be applied also to MEMS actuators and micromirrors.
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