Patterning of oxide-hardened gold black by photolithography and metal lift-off

Panjwani, Deep; Yeşiltaş, Mehmet; Nath, Janardan; Maukonen, D.; Rezadad, Imen; Smith, Evan M.; Peale, Robert E.; Hirschmugl, Carol J.; Sedlmair, Julia; Wehlitz, R.; Unger, Miriam; Boreman, Glenn D.

doi:10.1016/j.infrared.2013.11.005

Cited by 14 publications

(9 citation statements)

References 14 publications

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“…8 Figure 1 presents new the reflectance spectra R for a gold black layer with 250 nm SiO 2 protection measured at a 7˚ angle of incidence. A minimum reflectance of just under 7% occurs at 9.4 µm wavelength.…”

Section: Resultsmentioning

confidence: 99%

“…[8]. Specular and diffuse reflectance spectra were measured in a Hemispherical Directional Reflectance Spectrometer (HDR) with unpolarized light at incidence angles of 7˚, 15˚, 30˚, 45˚ and 60˚.…”

Section: Methodsmentioning

confidence: 99%

“…Devices are typically optimized for mid-wave IR (MWIR, 3-5 µm wavelength) or long-wave IR (LWIR, [8][9][10][11][12] µm wavelength) by Fabry-Perot 1,2 and other resonant structures, [3][4][5] whose peak absorbance and bandwidth depend on resonator Q and hence on fabrication tolerances. In contrast, gold black is a well-known absorber with very high absorption over a broad spectral range, 6 and which is easily deposited using an ordinary thermal evaporator.…”

Section: Introductionmentioning

confidence: 99%

“…Some of us recently succeeded in patterning gold black using evaporated SiO 2 as a protection layer. 8,9 Meanwhile, Plasmonics, Inc. has developed high-performance room-temperature air-bridge bolometers based on VO x -Au thin films. 10 In this paper, we report successful integration of patterned gold black onto such a bolometer array, which resulted in a substantial improvement in detector performance.…”

Section: Introductionmentioning

confidence: 99%

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Enhanced performance of VO_x-based bolometer using patterned gold black absorber

et al. 2015

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Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxidebased infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black's near unity absorption. This patterned gold black also survives the dryetch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Enhanced performance of VO_x-based bolometer using patterned gold black absorber

et al. 2015

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“…Gold-black satisfies these conditions 7 . This paper presents the first practical application of a novel means of patterning this usually fragile deposit 8 . Standard photolithography and lift-off in acetone is enabled by an evaporated 200 nm thick SiO 2 protection layer 8 .…”

Section: Goldblack Absorbermentioning

confidence: 99%

Linear bolometer array using a high TCR VO_x-Au film

Smith¹,

Ginn²,

Warren³

et al. 2014

SPIE Proceedings

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We present a design for a low-noise bolometer linear array based on the temperature-dependent conductivity of a VO xAu film. Typical thin film bolometers must compromise between low resistivity to limit Johnson noise and high temperature coefficient of resistivity (TCR) to maximize responsivity. Our vanadium oxide is alloyed with a small concentration of gold by co-sputtering, which gives very low resistivity and very high TCR simultaneously. The film is fabricated on an air bridge device having high thermal conductivity and small thermal time constant optimized for 30 to 60 Hz frame rates. The linear array functions as a low-power profile sensor with a modulated bias. For 1 V bias, we predict responsivity exceeding 1200 V/W. Johnson noise dominates with predicted NEP values as low as 1.0 x 10 -11 W/Hz 1/2 . Preliminary device testing shows film resistivity below 2.5 Ω-cm with TCR exceeding -2.0%. Preliminary measurements of NEP and D* are reported.

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Fabricating Three‐Dimensional Periodic Micro Patterns on Photo‐Resists Using Laser Interference Lithography

et al. 2017

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Springtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom‐like features. This topography offers surface functionalities like non‐wetting and preventing bacterial settlement. This study demonstrates a novel way of replicating the morphology of the springtail skin using interference lithography. The micro patterns are produced with an undercut contour in a multilayer resist system on Si‐wafers consisting of a lower lift‐off resist and an upper photo‐sensitive resist. After irradiation, several developing and rinsing steps are carried out to produce cavities in the lift‐off resist layer with an undercut geometry directly below the SU‐8 top layer.

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Patterning of oxide-hardened gold black by photolithography and metal lift-off

Cited by 14 publications

References 14 publications

Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Linear bolometer array using a high TCR VO_x-Au film

Fabricating Three‐Dimensional Periodic Micro Patterns on Photo‐Resists Using Laser Interference Lithography

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Patterning of oxide-hardened gold black by photolithography and metal lift-off

Cited by 14 publications

References 14 publications

Enhanced performance of VOx-based bolometer using patterned gold black absorber

Enhanced performance of VOx-based bolometer using patterned gold black absorber

Linear bolometer array using a high TCR VOx-Au film

Fabricating Three‐Dimensional Periodic Micro Patterns on Photo‐Resists Using Laser Interference Lithography

Contact Info

Product

Resources

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Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Linear bolometer array using a high TCR VO_x-Au film