Enhanced performance of VO<sub>x</sub>-based bolometer using patterned gold black absorber

Smith, Evan M.; Panjwani, Deep; Ginn, James; Warren, Andrew P.; Long, Christopher J.; Figuieredo, Pedro; Smith, Christian W.; Perlstein, Joshua; Walter, Nick; Hirschmugl, Carol J.; Peale, Robert E.; Shelton, David

doi:10.1117/12.2177401

Cited by 4 publications

(1 citation statement)

References 12 publications

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“…Previous studies on

-based bolometers have reported TCR values of −3.5%

[ 32 ], −2.3%

[ 33 ], −1.88 to −2.85%

[ 34 ] and −2.9%

[ 35 ]. The TCR values reported in this work (about −3.9%

) are higher than the reported values and this is most likely associated with the higher resistivity of the

films under study in this work.…”

Section: Resultsmentioning

confidence: 99%

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

et al. 2023

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The influence of carbon nanotube (CNT) dispersions on the electrical properties and noise signal amplitude of VOx films is investigated. For a critical range of the CNT dispersion density on VOx films, the intrinsic properties of the VOx films are modified by the CNTs. The CNT concentrations reported in this work are about 0.3 μg/cm2 and 1.6 μg/cm2, allowing for low density and high density dispersions on the VOx film surface to be investigated. These values are higher than the percolation threshold of about 0.12 μg/cm2 for these films. The composite film exhibits a significant reduction in the temperature coefficient of resistance (TCR) (from ≈3.8% K−1 to ≈0.3% K−1) for high density dispersions. In contrast, while VOx–CNT composites with low density single wall CNT dispersions exhibit no significant change in TCR values, an approximate two orders of magnitude reduction in the low frequency 1/f noise is measured. The noise signal amplitude measured at 0.1 V and at 1.0 Hz reduces from 6 × 10−5V/(Hz) for VOx films to 5 × 10−7V/(Hz) for the low density SWCNT dispersion on VOx film and to 3 × 10−6V/(Hz) for the low density MWCNT dispersion on VOx film. The CNT concentration is the critical factor for yielding the observed changes in conductivity and low frequency noise. The results presented in this work provide a better understanding of VOx-based composites, thereby enabling the development of new, versatile and functional materials for device applications.

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“…Previous studies on

-based bolometers have reported TCR values of −3.5%

[ 32 ], −2.3%

[ 33 ], −1.88 to −2.85%

[ 34 ] and −2.9%

[ 35 ]. The TCR values reported in this work (about −3.9%

) are higher than the reported values and this is most likely associated with the higher resistivity of the

films under study in this work.…”

Section: Resultsmentioning

confidence: 99%

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

et al. 2023

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Development and integration of near atmospheric N 2 ambient sputtered Au thin film for enhanced infrared absorption

Gaur

Kothari

Maninder

et al. 2017

Infrared Physics & Technology

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Dual band sensitivity enhancements of a VO_x microbolometer array using a patterned gold black absorber

et al. 2016

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Infrared-absorbing gold black has been selectively patterned onto the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves much of gold black's high absorptance. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. For our fabricated devices, infrared responsivity is improved 22% in the long-wave IR and 70% in the mid-wave IR by the gold black coating, with no significant change in detector noise, using a 300°C blackbody and 80 Hz chopping rate. The increase in the time constant caused by the additional mass of gold black is ∼15%.

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Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Cited by 4 publications

References 12 publications

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

Development and integration of near atmospheric N 2 ambient sputtered Au thin film for enhanced infrared absorption

Dual band sensitivity enhancements of a VO_x microbolometer array using a patterned gold black absorber

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Enhanced performance of VOx-based bolometer using patterned gold black absorber

Cited by 4 publications

References 12 publications

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

Analyzing the Bolometric Performance of Vanadium Oxide Thin Films Modified by Carbon Nanotube Dispersions

Development and integration of near atmospheric N 2 ambient sputtered Au thin film for enhanced infrared absorption

Dual band sensitivity enhancements of a VO_x microbolometer array using a patterned gold black absorber

Contact Info

Product

Resources

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Enhanced performance of VO_x-based bolometer using patterned gold black absorber