We reported the fabrication of amorphous or crystalline IGZO thin film transistors using atomic layer deposition (ALD) method. To observe the crystallinity effect of thin films which are used as a semiconductor channels for TFTs, we tried to deposit crystalline-IGZO thin films with improving preferred orientation. In this paper, we formed IGZO thin film showing highly-oriented crystalline properties by insertion seed layer underneath a IGZO thin films. As a result, we could figure out the interrelationship between semiconductor channel crystallinity and electrical performance of devices.
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