Using micro-crystallized high-κ SrTiO 3 on N + -treated TaN, very high 28 fF/µm 2 capacitance density, low voltage linearity (α) of 92 ppm/V 2 and small leakage of 3×10 -8 A/cm 2 at 2V are beyond ITRS spec of Analog capacitor at year 2018. Further improving to 44 fF/µm 2 and low α of 54 ppm/V 2 are obtained for higher speed Analog/RF ICs at 2 GHz.
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