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This paper describes a differentially detecting capacitive Z-axis SO1 accelerometer using a set of vertical comb electrodes. The device structure has only one silicon layer and there are no lower or upper electrodes. Z-axis acceleration was differentially detected by using a set of newly proposed vertical comb electrodes of different movable and fixed heights. The sensing area was 1.1 nun x 1.1 nun x 15 p.The performance of the accelerometer was calculated and measured experimentally to determine its linear capacitance change and voltage output against input acceleration. The measured capacitance sensitivity and its linearity were 1 .I tF/G and 0.21%, respectively.

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Articles you may be interested inOptimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes J.

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