Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology.

The stopping power and straggling of backscattered protons on nanometric Pt films were measured at low to medium energies (60-250 keV) by using the medium-energy ion scattering technique. The stopping power results are in good agreement with the most recent measurements by Primetzhofer Phys. Rev. B 86, 094102 (2012) and are well described by the free electron gas model at low projectile energies. Nevertheless, the straggling results are strongly underestimated by well-established formulas up to a factor of two. Alternatively, we propose a model for the energy-loss straggling that takes into account the inhomogeneous electron-gas response, based on the electron-loss function of the material, along with bunching effects. This approach yields remarkable agreement with the experimental data, indicating that the observed enhancement in energy-loss straggling is due to bunching effects in an inhomogeneous electron system. Nonlinear effects are of minor importance for the energy-loss straggling.

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Magnesium tetraborate (MgB4O7) is an example of a material that has attracted the attention of researchers in the field of ionising radiation dosimetry. Several challenges are presented in order to...