2021
DOI: 10.1016/j.apsusc.2020.147821
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Nanoparticle emission by electronic sputtering of CaF2 single crystals

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Cited by 5 publications
(4 citation statements)
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“…The formation of a subsurface region is accompanied by the emission of atoms and fragments from the surface of the material-the effect known as inelastic sputtering or sputtering in the electronic stopping regime. 85,405,406 It is in contrast to elastic or nuclear sputtering, which is a result of ion-ion collisions, knocking atoms out of the surface. Inelastic sputtering is a result of atomic heating due to relaxation of excited electrons.…”
Section: B Atomic Response: Sputtering and Nanohillocksmentioning
confidence: 99%
See 1 more Smart Citation
“…The formation of a subsurface region is accompanied by the emission of atoms and fragments from the surface of the material-the effect known as inelastic sputtering or sputtering in the electronic stopping regime. 85,405,406 It is in contrast to elastic or nuclear sputtering, which is a result of ion-ion collisions, knocking atoms out of the surface. Inelastic sputtering is a result of atomic heating due to relaxation of excited electrons.…”
Section: B Atomic Response: Sputtering and Nanohillocksmentioning
confidence: 99%
“…It is a two-step process, consisting of the direct atomic emission with high kinetic energies and a later hydrodynamic emission of atomic ensembles (nanoparticles or nanoclusters). 267,406 Increased atomic kinetic energy overcomes the cohesive energy of atoms, allowing them to escape from the surface during the first ten picoseconds after an ion impact. An example of it is seen in Fig.…”
Section: B Atomic Response: Sputtering and Nanohillocksmentioning
confidence: 99%
“…Depending on the energy regime of the ions and the type of material being bombarded, the shape of the impact features and the underlying mechanisms of formation may differ, but the resultant structures are always huge compared to the atomic size of the particles that produce them. For example, in metals, a 400 keV Au ion impacting on a thin Au layer can produce rimmed craters containing thousands of atoms [16]; in polymers, a 200 MeV Au ion is able to eject, at grazing angles, a volume of material corresponding to a mass of ∼10 6 u [17]; in ionic crystals, a 180 MeV Au ion may eject a nanoparticle with a diameter of 10 nm [18].…”
Section: Introductionmentioning
confidence: 99%
“…Surface modifications were mostly observed on insulating materials (e.g. CaF 2 , Al 2 O 3 , SrTiO 3 , BaF 2 , LaF 3 , LiF and others [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30]) as they are more sensitive to structural modifications induced by electronic excitations due to their large bandgap [31]. While the energy deposition for irradiation with HCIs is surface sensitive and only affects the topmost layers, an irradiation with SHIs, due to the large penetration depth [32], is not desirable for e.g.…”
Section: Introductionmentioning
confidence: 99%