“…The formation of a subsurface region is accompanied by the emission of atoms and fragments from the surface of the material-the effect known as inelastic sputtering or sputtering in the electronic stopping regime. 85,405,406 It is in contrast to elastic or nuclear sputtering, which is a result of ion-ion collisions, knocking atoms out of the surface. Inelastic sputtering is a result of atomic heating due to relaxation of excited electrons.…”