“…(TEM) by Fleischer et al [3,4], in oxides (SiO 2 -quartz, Al 2 O 3 , ZrSi 2 O 4 , Y 3 Fe 5 O 12 , high-Tc superconducting copper oxides, etc.) (TEM) by Meftah et al [5] and Toulemonde et al [6], in Al 2 O 3 crystal (atomic force microscopy, AFM) by Ramos et al [7], in Al 2 O 3 and MgO crystals (TEM and AFM) by Skuratov et al [8], in Al 2 O 3 crystal (AFM) by Khalfaoui et al [9], in Al 2 O 3 crystal (high resolution TEM) by O'Connell et al [10], in amorphous SiO 2 (small angle X-ray scattering (SAXS)) by Kluth et al [11], in amorphous SiO 2 (TEM) by Benyagoub et al [12], in polycrystalline Si 3 N 4 (TEM) by Zinkle et al [13] and by Vuuren et al [14], in amorphous Si 3.55 N 4 (TEM) by Kitayama et al [15], in amorphous SiN 0.95 :H and SiO 1.85 :H (SAXS) by Mota-Santiago et al [16], in epilayer GaN (TEM) by Kucheyev et al [17], in epilayer GaN (AFM) by Mansouri et al [18], in epilayer GaN and InP (TEM) by Sall et al [19], in epilayer GaN (TEM) by Moisy et al [20], in InN single crystal (TEM) by Kamarou et al [21], in SiC crystal (AFM) by Ochedowski et al [22] and in crystalline mica (AFM) by Alencar et al [23]. Amorphization has been observed for crystalline SiO 2 [5] and the Al 2 O 3 surface at a high ion fluence (though the XRD peak remains) by Ohkubo et al [24] and Grygiel et al [25].…”