Effective plasma confinement by applying multipolar magnetic fields in an internal linear inductively coupled plasma systemIn this study, the effects of axial electromagnet, variously configured multidipole permanent magnets and their combinations, on the characteristics of a square shaped (210 mmϫ210 mm) inductively coupled plasma source were investigated using a single electrostatic probe for Ar plasmas. The use of multidipole magnets mainly changed the uniformity of the plasma without changing the ion density of the plasma greatly. An optimized shape of the permanent magnets increased the uniformity of the plasma, and the uniformity of the ion density less than 6.0% could be obtained when measured from the center of the chamber to 10 mm before the chamber wall at 600 W of inductive power and 2 mTorr of operational pressure. The use of axial electromagnet mainly increased the ion density with the decrease of the uniformity, and ion density up to 7.5 ϫ10 11 cm Ϫ3 could be obtained with 25 G at 600 W of inductive power and 5 mTorr of operational pressure. The addition of the optimized multidipole magnet to the axial electromagnet also improved the uniformity, and it showed the lowest electron temperature ͑3 eV͒ and plasma potential (34V P ). The etch uniformities of polysilicon etched using Cl 2 gas showed the similar trends as the uniformities of the ion density measured for variously configured magnets.
Long gas evacuation time before the introduction of the discharge gases into the panel is one of the major problems in the production of a plasma display panel ͑PDP͒. In this study, the outgassing characteristics during the panel evacuation stage were investigated using a quadrupole mass spectrometer. The origin of the impurity gas was studied by measuring the outgassed species from each layer comprising the PDP. Dominant species observed during the evacuation of the panel were H 2 , H 2 O, N 2 , O 2 , and CO 2 and water vapor was the most abundant species. When the outgassing characteristics of the panel were compared with the outgassing characteristics from each layer comprising the panel, the material most responsible for the water vapor turned out to be a MgO layer. The outgassing experiments of single panels have also shown that the long outgassing time of PDP is mostly related to the MgO layer and possibly also to red, green, and blue layers and white dielectric material coated on the each single panel. Therefore to reduce the gas evacuation time, controlled atmosphere appears to be required during the deposition of these materials and the storage of those deposited panels.
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