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An innovative resonance excitation methodology of a two-dimensional array of uniformly patterned structure into extremely high-quality factor (Q) mode using engineered frequency-matched thin piezoelectric film on substrate (TPoS) transducer is demonstrated in this Letter. The passive Q-enhancement can be attained lithographically without adding to the power requirement of the system. A 500 nm thick piezoelectric material facilitates the inter-electrical-mechanical domain coupling, and the displacement generated at the transducer periphery drives the patterned 10 μm thick single crystal silicon plate into various resonant modes. Using this topology, unexplored modes can be generated as well by the forced vibration feature of the interacting resonant tanks. Utilizing a multiport port excitation scheme, multiple modes are explored, while the primary focus is maintained on the Lamé mode of the array. In vacuum for an operational frequency of 58.56 MHz, an exceptionally high-quality factor of 58 276 is attained with a motional resistance of 1250 Ω and this is the record-high figure of merit (f × Q = 3.4 × 1012) attained for aluminum nitride-based TPoS based resonators. This successful demonstration of the energy coupling scheme paves a path for the study of existing and investigation of unexplored high-Q modes spanning over a wide range of frequency, making these devices a potential candidate for radio frequency front-end applications. The CMOS compatibility of aluminum nitride makes it an attractive solution for achieving low phase noise monolithically integrated CMOS–microelectromechanical systems oscillators.

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Nonlinear physics-based harmonic generators and modulators are critical signal processing technologies for optical and electrical communication. However, most optical modulators lack multi-channel functionality while frequency synthesizers have deficient control of output tones, and they additionally require vacuum, complicated setup, and high-power configurations. Here, we report a piezoelectrically actuated nonlinear Microelectromechanical System (MEMS) based Single-Input-Multiple-Output multi-domain signal processing unit that can simultaneously generate programmable parallel information channels (> 100) in both frequency and spatial domain. This significant number is achieved through the combined electromechanical and material nonlinearity of the Lead Zirconate Titanate thin film while still operating the device in an ambient environment at Complementary-Metal–Oxide–Semiconductor compatible voltages. By electrically detuning the operation point along the nonlinear regime of the resonator, the number of electrical and light-matter interaction signals generated based on higher-order non-Eigen modes can be controlled meticulously. This tunable multichannel generation enabled microdevice is a potential candidate for a wide variety of applications ranging from Radio Frequency communication to quantum photonics with an attractive MEMS-photonics monolithic integration ability.