Exploration and Realization of Novel High-<i>Q</i> Bulk Modes Using Support Transducer Topology

Pillai, Gayathri; Li, Sheng-Shian

doi:10.1109/jmems.2021.3093250

Cited by 3 publications

(9 citation statements)

References 25 publications

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“…The device used in this work is designed based on support transducer topology (STT). Previous results have shown the potential of this design strategy for a high Q-factor piezoelectric resonator [18,19]. Additional resonant tanks, i.e.…”

Section: Device Designmentioning

confidence: 93%

Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop

Chang

Wang

2023

J. Micromech. Microeng.

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This work investigates the performance enhancement of piezoelectric bulk mode mode-matched gyroscopes based on a secondary phase feedback loop. An independent phase feedback loop realized by a lock-in amplifier is applied on a 10-MHz multiple ports piezoelectric device to harness its effective stiffness and damping factor for better gyroscope performance. The multiple ports device is designed based on support transducer topology (STT) with eight transducer arms, some of which drive the central resonant tank into a secondary elliptical mode. Open-loop measurement with varied phase delay is adopted to carry out the best working condition (i.e., higher Q-factor, smaller frequency split). Therefore, the measured scale factor results in a 1.56 times improvement through boosting the Q-factor of the driving mode. The minimum frequency split compensated by the phase feedback could reach 13.4 ppm with a tuning phase of 60 degrees and tuning voltage of 0.1 V. The bias instability of the proposed gyro through the help of phase feedback loop could be reduced by 2.13 times. The achievement in this work has shown that the phase feedback mechanism could indeed help to improve the performance of the resonant transducers.

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Section: Device Designmentioning

confidence: 93%

Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop

Chang

Wang

2023

J. Micromech. Microeng.

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“…In the works reported in [17], resonators with STT configuration have been used to excite conventional modes like the Wine glass and the Lamé modes which showed high-Q with low motional resistance. In [19], the concept of exciting higher-order mode with STT was proven successfully, with the novel radial mode operating at a much higher frequency than the conventional fundamental radial extension mode. Figure 2(c) shows the schematic of a first-generation higher-order mode resonator design with STT and the simulated frequency response; T1 and T2 are combined as the differential drive terminals and T3 and T4 are combined as the differential sense terminals to realize a fully DIDO configuration.…”

Section: Motivationmentioning

confidence: 99%

“…Figure 2(c) shows the schematic of a first-generation higher-order mode resonator design with STT and the simulated frequency response; T1 and T2 are combined as the differential drive terminals and T3 and T4 are combined as the differential sense terminals to realize a fully DIDO configuration. Even though the first-generation higher-order mode excited resonator exhibited high-Q [19], the motional resistance of the resonator was rather on the higher side which is a concern when it is to be implemented in an oscillator circuit to meet the stringent PN requirements. The main difference between the first-generation resonator design and the newly proposed one is in the means by which the higher-order mode is excited; the former used a higher-order mode confined in the geometry that was optimized for fundamental length extension mode whereas the latter takes advantage of the WE mode to excite the high-Q resonant tank.…”

Section: Motivationmentioning

confidence: 99%

“…Figure 1(a) shows the schematic of the WE driven higher-order mode resonator which is configured in a fourport configuration (four support transducers). Unlike the work reported in [19], a WE mode transducer is utilized here since the fundamental WE mode transducer is proven to work optimally in the higher frequency domain. The four WE mode support transducers are designed such that their resonant frequency (using equation ( 1) coincides with the resonant frequency of the higher-order radial mode.…”

Section: Resonator Design Conceptmentioning

confidence: 99%

“…However, the performance of TPoS resonators continues to be restricted by the charge cancellation issue due to the unconventional strain distribution of the high-performance mode such as Lamé mode [14][15][16]. With the advent of support transducer topology (STT), the aforementioned shortcoming was eliminated as it allowed an electrical decoupling between the high-Q and drive/sense resonant tanks [17][18][19]. Yet, the MEMS resonator study has mostly focused on driving the fundamental modes or phononic crystal array of well-known modes.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator

Kongbrailatpam

Jen²,

Li³

et al. 2022

J. Micromech. Microeng.

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This work reports the successful excitation of a novel bulk acoustic mode whose actuation and sensing are facilitated by the support transducer topology (STT). The design methodology concurrently supports low motional impedance and high energy confinement features which are crucial for frequency reference components in Radio Frequency communication. A conventional bulk mode operating in the Width Extension (WE) mode is deployed to efficiently excite the higher-order radial mode using the STT design feature of resonant frequency matching. The thin-film piezoelectric on substrate (TPoS) support transducers excited in a WE mode is mechanically coupled to the bulk silicon allowing the acoustic energy of the MEMS resonator to be stored maximally in the high-quality factor (Q) resonant tank, thereby alleviating the overall losses due to low-Q of the piezoelectric thin film and electrode material. The resonator exhibits a Q of 19,728 at 63.56 MHz resonant frequency with a motional resistance (Rm) of 368 Ω when measured in vacuum at a power level of 0 dBm. Under cryogenic measurement conditions, the device recorded a Q of 24,153 at 15 K. A standalone WE resonator is studied to put a spotlight on the quality factor enhancement technique using the STT. The STT enabled novel bulk mode enhances the overall Q by 320% and halves the Rm. When implemented as an oscillator, its performance exceeds the Global System for Mobile (GSM) communication standards phase noise requirements. Phase noise (PN) of -136.95 dBc/Hz and -161.52 dBc/Hz at 1 kHz and 1 MHz offset, respectively, were recorded when normalized to a carrier frequency of 13 MHz.

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Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation

Han

Xiao

Chen

et al. 2023

J. Microelectromech. Syst.

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Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology

Cited by 3 publications

References 25 publications

Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop

Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop

Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator

Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation

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