B diffusion in implanted Ni 2 Si and NiSi layers has been studied using secondary ion mass spectrometry, and compared to B redistribution profiles obtained after the reaction of a Ni layer on a B-implanted Si͑001͒ substrate, in same annealing conditions ͑400-550°C͒. B diffusion appears faster in Ni 2 Si than in NiSi. The B solubility limit is larger than 10 21 atom cm −3 in Ni 2 Si, while it is ϳ3 ϫ 10 19 atom cm −3 in NiSi. The solubility limit found in NiSi is in agreement with the plateau observed in B profiles measured in NiSi after the reaction of Ni on B-implanted Si.
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