The calculation is based on the use of Monte Carlo method (method of test particle), which consists in the statistical modeling of processes. The article describes an algorithm to construct a mathematical model step by step. The article defines both a probability for gas molecules to pass through the interstage channel of a hybrid turbomolecular pump in forward and backward direction. The effect of the movable walls limiting the channel is taken into account. Results and, accordingly, recommendations, given in the article, can be used in designing a flow passage of the hybrid turbomolecular pumps. The dependencies of a probability for gas molecules to pass through the interstage canal on the relative parameters determining the geometry and dynamics of the channel walls are given
The interstage channel is one of the factors affecting the efficiency of the molecular drag stage in a hybrid turbomolecular pump (TMP). The influence of parameters of the channel on the pumping performance of the molecular drag stage is investigated. The offered approach allows calculating the pumping performance of a molecular drag stage taking into account the effect of the interstage connecting channel on the pumping process. The comparison of the pumping characteristics of a molecular drag stage obtained in calculation taking into account the effect of the channel and excluding it is given. This article assesses the efficiency of the molecular drag stage in a hybrid TMP depending on geometric and dynamic parameters of the channel. The outcomes and recommendations allow to expand the range of working pressures of a hybrid TMP exclusively by means of parameters of the connecting channel.
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