Abstract:The calculation is based on the use of Monte Carlo method (method of test particle), which consists in the statistical modeling of processes. The article describes an algorithm to construct a mathematical model step by step. The article defines both a probability for gas molecules to pass through the interstage channel of a hybrid turbomolecular pump in forward and backward direction. The effect of the movable walls limiting the channel is taken into account. Results and, accordingly, recommendations, given in… Show more
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