Abstract:The interstage channel is one of the factors affecting the efficiency of the molecular drag stage in a hybrid turbomolecular pump (TMP). The influence of parameters of the channel on the pumping performance of the molecular drag stage is investigated. The offered approach allows calculating the pumping performance of a molecular drag stage taking into account the effect of the interstage connecting channel on the pumping process. The comparison of the pumping characteristics of a molecular drag stage obtained … Show more
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