The internal stress and strain in boron-doped diamond films grown by microwave plasma chemical vapor deposition ͑MWCVD͒ and hot filament CVD ͑HFCVD͒ were studied as a function of boron concentration. The total stress ͑thermalϩintrinsic͒ was tensile, and the stress and strain increased with boron concentration. The stress and the strain measured in HFCVD samples were greater than those of MWCVD samples at the same boron concentration. The intrinsic tensile stress, 0.84 GPa, calculated by the grain boundary relaxation model, was in good agreement with the experimental value when the boron concentration in the films was below 0.3 at. %. At boron concentrations above 0.3 at. %, the tensile stress was mainly caused by high defect density, and induced by a node-blocked sliding effect at the grain boundary.
Diamond crystals of 1 μm mean size were grown on (100) silicon substrates by ArF (193 nm) laser ablation of graphite in a hydrogen atmosphere with a laser power density of 1.3×108 W/cm2 at relatively low substrate temperature (450 °C). Raman spectroscopy analysis confirmed the diamond cubic structure of the crystals by the presence of a sharp peak at 1332 cm−1. When a KrF (248 nm) laser was used instead of the ArF no diamond phases were detected in the deposited films and the Raman spectra showed only the two bands centered at 1340 and 1600 cm−1 characteristic of amorphous carbon. The results demonstrated that the laser wavelength is a determinant parameter in the growth of diamond by laser ablation of graphite.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.