We report on the generation and amplification of pulses with pulse widths of 400 - 1000 ps at 1064 nm. For pulse generation an ultra-fast semiconductor modulator is used that modulates a cw-beam of a DFB diode laser. The pulse lengths could be adjusted by the use of a voltage control. The pulses were amplified in a solid state Nd:YVO₄ regenerative amplifier to an average power of up to 47.7 W at 100 - 816 kHz.
Highest quality in laser micromachining is obtained using ultrashort light pulses with energies slightly above ablation threshold. Together with very high pulse repetition rates and a new type of fast beam deflection technology, new pathways in laser micromachining have been opened. As examples, we show results of improved surface texturing and carbon-fiber reinforced plastic material removal using this technology.
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