This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A. low loss of 0.35dBicm at 25GHz has been achieved in the fabricated transmission lines. , 0-7803-7744-3/03/$17.00 02003 IEEE.
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