No abstract

No abstract

Inspection of uncoated insulating samples in a scanning electron microscope (SEM) is possible by using low beam voltages in order to minimize charging effects. In this paper, the principal parameters affecting the target potential under bombardment by electrons are considered. The influence of primary beam energy and the detector (collector) potential have been investigated. Surface potentials were measured by evaluating the deflection of a ‘‘measuring’’ electron beam which passes parallel above the target surface. The dependence of the surface potential on the incident beam energy and the collector potential has been measured on several materials. Curves obtained for ceramic, glass, copper, and gold are presented. Crossover energies (emission ratio equal to unity) have been determined by these measurements on Au, Cu, Mo, C, Si, GaAs, Sapphire, SiO2, glass, ceramic, and polyimide.

No abstract

No abstract