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Transparent polycrystalline TiO2 thin films have been deposited on unheated glass substrates using RF reactive magnetron sputtering. Depositions were carried out at different glancing angles and with different total gas mixture pressures. The variation of these parameters affected the crystal phase composition and the surface morphology. Depending on the glancing angle and the pressure, rutile, mixed anatase/ rutile and pure anatase were deposited at low substrate temperature. Both hydrophilic and hydrophobic TiO2 were obtained, exhibiting fast photoconversion to superhydrophilic upon UV irradiation. The effect of the materials physicochemical properties on the wettability and rate of the UV induced superhydrophilicity is evaluated.

Abstract. The deposition of hydrophobic fluorocarbon coatings from C 2 F 6 and C 2 F 6 -H 2 rf discharges on different substrates was examined. Polyester textile, glass and two different ceramic compounds were used as substrates. The effect of the total gas pressure, the rf power dissipation and the deposition time on the hydrophobic character of the samples was investigated. Films deposited on polyester textiles at low pressure (0.03 mbar) and power consumption (16 mW/cm 2 ) using pure C 2 F 6 presented the highest water contact angles (~150 o ).On the other hand, the addition of hydrogen was necessary in order to deposit stable hydrophobic coatings on glass and ceramic substrates. Coatings deposited on glass at intermediate deposition rates (~100 Å/min) and pressures presented the highest angles (~105 o ).Concerning the heavy clay ceramics, samples treated in low pressure (0.05 mbar) and low power (16 mW/cm 2 ) discharges showed the highest contact angles The deposition time was found to play an important role on the hydrophobicity and long term behavior of porous and rough substrates.

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