Abstract-We have micromachined a mechanical sensor that uses interferometry to detect the differential and absolute deflections of two adjacent cantilevers. The overall geometry of the device allows simple fluidic delivery to each cantilever to immobilize molecules for biological and chemical detection. We show that differential sensing is 50 times less affected by ambient temperature changes than the absolute, thus enabling a more reliable differentiation between specific cantilever bending and background effects. We describe the fabrication process and show results related to the dynamic characterization of the device as a differential sensor. The root-mean-squared (rms) sensor noise in water and air is 1 nm over the frequency range of 0.4-40 Hz. We also find that in air, the deflection resolution is limited only by the cantilever's thermomechanical noise level of 0.008 A Hz 1 2 over the frequency range of 40-1000 Hz.[781]
The size, distribution, and composition of inclusions during the desulphurisation and deoxidation steps were studied in laboratory experiments. 3 different calcium‐based desulphurisation mixtures were used. The number of inclusions and composition of inclusions were then determined using optical microscopy and scanning electron microscopy, respectively. The results show that 2 of the 3 proposed desulphurisation mixtures managed to render lower and roughly equivalent inclusion counts. The results also show that the composition of the inclusions in all 3 samples varied from the beginning to the end of the desulphurisation process. A desulphurisation mixture consisting of Al, CaO, CaCO3 and CaSi produced the overall best results with respect to desulphurisation and inclusion characteristics.
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