2002
DOI: 10.1109/jmems.2002.805057
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Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions

Abstract: Abstract-We have micromachined a mechanical sensor that uses interferometry to detect the differential and absolute deflections of two adjacent cantilevers. The overall geometry of the device allows simple fluidic delivery to each cantilever to immobilize molecules for biological and chemical detection. We show that differential sensing is 50 times less affected by ambient temperature changes than the absolute, thus enabling a more reliable differentiation between specific cantilever bending and background eff… Show more

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Cited by 36 publications
(25 citation statements)
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“…By employing aptamers as immobilized receptor molecules, the selectivity of microcantilevers toward specific analytes can be improved since non-specific adsorption can be reduced. The work of Savran et al (2002Savran et al ( , 2003Savran et al ( , 2004 was the first attempt at such a device (Fig. 2).…”
Section: Micro-and Nanocantilever Aptasensorsmentioning
confidence: 99%
“…By employing aptamers as immobilized receptor molecules, the selectivity of microcantilevers toward specific analytes can be improved since non-specific adsorption can be reduced. The work of Savran et al (2002Savran et al ( , 2003Savran et al ( , 2004 was the first attempt at such a device (Fig. 2).…”
Section: Micro-and Nanocantilever Aptasensorsmentioning
confidence: 99%
“…The equations describing the cantilever deflection (4)(5)(6)(7)(8) assume that the strain is small, an assumption that is valid for all of the deflections encountered in our experiments.…”
Section: Microcantilever Sensorsmentioning
confidence: 99%
“…The most critical parts of all the above actuators may be very small; however, as large energy is required, they usually have to use external electrical power supply sources connected to the microsystems through wires, which will result in device packaging difficulties, weak mobility, electrical interference, or an enlarged device size. Therefore, several researchers adopted laser as the direct power to heat the actuator (Chen et al, 1998;Lalinský et al, 2005;Pichonat et al, 2004;Poosanaas et al, 2000;Savran et al, 2002). They all have obtained various degrees of success, but due to their complex manufacture they are hard to be applied practically.…”
Section: Introductionmentioning
confidence: 99%