In this paper, we report the overall design, fabrication and optical characterization of single and multiple resonant micro-structures patterned on the UV210 polymer and shaped by adequate deep-UV lithography procedures. Various families of ring and racetrack forms are investigated with different geometrical dimensions linked to the micro-resonators and the specific taper-waveguides and gaps allowing the optimized coupling. Well defined photonic structures families in the sub-micrometer range obtained by this deep UV-light process are clearly confirmed through scanning electron microscopy. In order to evaluate and quantify the efficiency of the submicrometer coupling, the recirculation of the light and the quality of the optical resonance aspects, a global study including top view intensity imaging, spectral measurements and Fast Fourier Transform analysis is performed for all these devices based on single and multiple family resonators. The experimental TE-mode resonance transmissions reveal a complete agreement with the period of the theoretically expected resonances. A maximum value of the quality factor Q = 3.5 x 10 3 at 1035 nm with a 3.2 times higher resonance contrast is assessed for cascade of triple micro-resonators respect to the photonic devices based on only one micro-resonator. In addition, these UV210 circuits made of specific tapers coupling to cascade loops act directly on the improvement of the evanescent coupling and resonances in terms of quality factor and extinction rate, by selecting successively and more precisely the optical mode resonance. All these designs and low cost technological reproducible steps, and furthermore the devices and protocol measurements are markedly suitable for mass fabrication and metrology applications.
In this paper, we report on the design and the overall realization of micro-resonators based on the development of adequate processes on a UV210 polymer. These micro-optical structures are developed by deep ultraviolet lithography allowing fabrication of nano-structured devices by means of low cost and reproducible processes. Two families of resonant micro-structures shaped on disk and stadium with various sizes are investigated. Structural and optical imaging characterizations have been carried out to ensure their ability to act as resonant integrated micro-structures. At first, scanning electron microscopy and Nomarsky microscopy studies confirm the UV-light process resolution down to 450 nm developed on a UV210 polymer. Then, optical characterizations have been performed as regards intensity and spectral properties of such micro-resonators. Field intensity measurements in visible and infrared ranges have been realized and validate light propagation by evanescent coupling between waveguides and micro-resonators. Finally, spectral analyses on TE modes demonstrate the presence of optical resonances with 1.45 nm and 2.19 nm free spectral range values for respectively disk and stadium micro-structures. The UV210 polymer appears appropriate for the realization of micro-structures requiring a few hundred nanometers gap-scale while maintaining adequate spectral properties for versatile applications in telecommunication and metrology.
International audienceWe report the theoretical and experimental study of photonic propagation in organic dielectric nanotubes elaborated by a wetting template method and showing off an aspect ratio as high as 200. Single mode behaviour is theoretically demonstrated without any cut-off conditions. Efficient evanescent coupling between polymer microstructures and nanotubes dispersed on a photonic chip as well as the high confinement and propagation in a single nanotube have been demonstrated. These results show the potential of well-defined one-dimensional nanostructures as building blocks for integrated organic photonic devices. Applications such as sensing and high speed communication are envisaged
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