Investigation of fabrication and resonant optical coupling in various 2D micro-resonator structures in a UV210 polymer

Abstract

In this paper, we report on the design and the overall realization of micro-resonators based on the development of adequate processes on a UV210 polymer. These micro-optical structures are developed by deep ultraviolet lithography allowing fabrication of nano-structured devices by means of low cost and reproducible processes. Two families of resonant micro-structures shaped on disk and stadium with various sizes are investigated. Structural and optical imaging characterizations have been carried out to ensure their ability to act as resonant integrated micro-structures. At first, scanning electron microscopy and Nomarsky microscopy studies confirm the UV-light process resolution down to 450 nm developed on a UV210 polymer. Then, optical characterizations have been performed as regards intensity and spectral properties of such micro-resonators. Field intensity measurements in visible and infrared ranges have been realized and validate light propagation by evanescent coupling between waveguides and micro-resonators. Finally, spectral analyses on TE modes demonstrate the presence of optical resonances with 1.45 nm and 2.19 nm free spectral range values for respectively disk and stadium micro-structures. The UV210 polymer appears appropriate for the realization of micro-structures requiring a few hundred nanometers gap-scale while maintaining adequate spectral properties for versatile applications in telecommunication and metrology.

Microphotonics for monitoring the supramolecular thermoresponsive behavior of fatty acid surfactant solutions

“…It is well reported that this process has allowed resolutions <400nm in the size of the IO devices. The whole fabrication procedure and the full quality control of the photonic device is reported elsewhere [21,22]. The microresonator is based on a racetrack shape and light is laterally coupled with a straight tapered optical waveguide, Figure 1.…”

About monitoring the dynamics of phase transition in food and biology by micro-photonics: detecting soft-matter process

“…Integrated polymeric micro-resonators are fabricated through deep UV (DUV) photolithography procedures and are based on UV210 photoresist [11][12] . This specific DUV-polymer is made of poly p-hydroxystyrene and poly t-butyl acrylate; it is called an amplified chemical photoresist including a photo acid generator so as to increase the sensitivity with energy exposure and to obtain a better photolithography mechanism.…”

A laterally coupled UV210 polymer racetrack micro-resonator for thermal tunability and glucose sensing capability

“…This gap value overcomes those discussed in previous publications, where we also observed clear resonance transmission. 15,16 The R ¼ 50 mm radius and the Lc ¼ 60 mm coupling length are both main features characterizing the Figure 1 Schematic representation of racetrack microresonator. Parameters R, Lc and g represent, respectively, the radius, the coupling length and the distance between the rib waveguides and the microresonators geometry of a racetrack.…”

“…11,18 -20 In this work, we present the viability of a specific microresonator, based on a racetrack shape and on UV210 photoresist, as a temperature and glucose sensor. Recently, UV210 photoresist has been used as single mode rib waveguides 21 and submicrometer 2D-resonators 15 demonstrating the high capability of the polymer for photonic miniaturization. Then, the design and the overall fabrication and optical characterization of a cascade of multiple microresonators acting as modal filters have been presented.…”