A new fast semiconductor dew point hygrometer for laryngological applications is presented in the report. The hygrometer construction based on integrated in the single semiconductor sensor structure the impedance dew detector, the thermoresistor and the heater is described in the paper. The experimental results of the dew point hygrometer tests in laryngological measurements (during patient respiration cycle) are shown and discussed in the report.
The paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between −10 °C and 40 °C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.
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