2006
DOI: 10.1016/j.sna.2006.02.017
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Fast dew point hygrometer with silicon integrated detector—Optimization of dynamic properties

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Cited by 23 publications
(6 citation statements)
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“…Due to gas-liquid shift on the surface of the quartz crystal during the active condensation processes, a change in the motional impedance is caused, represented by theΔL andΔR in Eq. (5,6). By combining the circuit model of the Colpitts oscillator ( Fig.3b) with the equivalent circuit model of the resonator (Fig.2b), total responses varying with the humidity during the condensation are simulated.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Due to gas-liquid shift on the surface of the quartz crystal during the active condensation processes, a change in the motional impedance is caused, represented by theΔL andΔR in Eq. (5,6). By combining the circuit model of the Colpitts oscillator ( Fig.3b) with the equivalent circuit model of the resonator (Fig.2b), total responses varying with the humidity during the condensation are simulated.…”
Section: Resultsmentioning
confidence: 99%
“…In the dew point measurement, the detection and recognition of dew point are viewed as the key technology. The typical recognition way of dew point is making use of a Peltier module and an optical emitter-detector [5,6]. However, the detection system is easily affected by dust and pressure.…”
Section: Introductionmentioning
confidence: 99%
“…The developed QCM dew/frost sensor has measurement errors of < ±0.2 • C at temperatures greater than −60 • C, as compared with ±0.2 • C for optical dew-point hygrometers [25] and ±0.3 • C ∼ ±0.5 • C for other types of dewpoint detectors, e.g. laser dew-point hygrometers [27,28], impedance dew-point detectors [29] and evanescent field detection techniques [30]. This demonstrates that the QCM dew/frost-point sensor has similar accuracy to other dewpoint sensors for temperatures greater than −60 • C. In contrast, while optical dew-point hygrometers exhibit poor performance, low sensitivity due to the optical detection limit and long response time, etc, at dew/frost points below −70 • C (even though some commercial optical chilled mirror hygrometers show good accuracy of ± 0.1 • C in the range below −70 • C), the QCM dew/frost-point sensor we have developed maintains reasonable accuracy even for very low dew/frost points with errors in the range ±0.…”
Section: Dew/frost-point Measurementmentioning
confidence: 98%
“…A silicon MEMS sensor has been designed to replace the mirror in a conventional dew point hygrometer with an electrical thermometer inside (usually a Pt 100 thermoresistor) and an optical dew detector [16]. The silicon MEMS structure contains three integrated devices: the interdigitated capacitive dew detector, the thermoresistor and the heater (figures 3 and 4).…”
Section: Silicon Mems Sensor Of Dew Point Temperaturementioning
confidence: 99%