Optical phase-gradient metasurfaces, whose unique capabilities are based on the possibility to arbitrarily control the phase of reflected/transmitted light at the subwavelength scale, are seldom characterized with direct measurements of phase gradients. Using numerical simulations and experimental measurements, we exploit the technique of scanning differential heterodyne microscopy (SDHM) for direct phase and amplitude characterization of gap-plasmon based optical metasurfaces. Two metasurface configurations utilizing the third-order gap surface plasmon (GSP) resonance, representing a binary grating and linear phase gradient, are experimentally characterized with the SDHM operating at the light wavelength of 633 nm. Comparing the experimental performances of these GSP metasurfaces with those expected from the phase and amplitude profiles reconstructed from the SDHM measurements, we verify the efficiency and accuracy of the developed SDHM characterization approach for direct inspection of GSP reflective metasurfaces.
The possibility of achieving superresolution on a microstep phase image in a laser scanning differential heterodyne microscope is studied both heoretically and experimentally. The superresolution is estimated as the width ratio for the amplitude and phase components of the microscope response measured at half the height of the corresponding parts of the response. It is shown theoretically that superresolution greatly exceeding unity can be achieved for an object in the form of a phase microstep introducing a phase shift equal to π. Superresolution of ∼2 is experimentally obtained for certified test micro-objects. A possibility of tuning a test sample into the superresolution regime by shifting a point photodetector in the microscope’s Fourier plane is demonstrated.
The solution of inverse problem of heterodyne differential microscope based on representation of linear part of microscope response by moments of object function is realized. The parameters of step-like object was determined with superresolution.
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