Implementation of the coupled-wave method for V-shaped groove characterization with a scanning differential heterodyne microscope

Superresolution in phase image of π-phase step on plasmonic metasurface using differential heterodyne microscope

“…However, it is possible to restore the profile of the local amplitude-phase reflection coefficient of the object using a special linearization procedure 39 . Previously, we presented the image formation theory of SDHM using the approximate scalar theory of light diffraction 39 and rigorous vector diffraction theory 40 . We treat plasmonic metasurface as a thin phase screen; therefore, we can apply the scalar version of the image formation theory.…”

“…39 Previously, we presented the image formation theory of SDHM using the approximate scalar theory of light diffraction 39 and rigorous vector diffraction theory. 40 We treat plasmonic metasurface as a thin phase screen; therefore, we can apply the scalar version of the image formation theory. According to the theory, the SDHM response to an amplitude-phase object with profile function rðxÞ is expressed as E Q -T A R G E T ; t e m p : i n t r a l i n k -; e 0 0 1 ; 1 1 7 ; 1 7 7…”

Characterization of V-shaped plasmon polariton waveguides using a differential heterodyne microscope at single polarization

“…In the first stage the forward problem for triangular waveguides is being solved by the image formation theory of SDHM [7]. The optical scheme of SDHM to be used in numerical simulation is based on a Mach-Zehnder interferometer designed according to a common-path scheme (figure 1).…”

“…To use the RCWA, the grating region should be divided into L thin planar layers (see figure 2). Then the relative permittivity in the lth layer is a periodic function of x and can be represented by Fourier series in the form: Optical set-up of a scanning differential heterodyne microscope: He-Ne laser (1), beam expander (2), Bragg cell (3), half-wave plate (4), beam splitter (5), microobjective (6), scanning stage (7), sample (8), photodetector (9).…”

“…In previous studies a possible application of SDHM for characterization of plasmon polariton waveguides [4] of both rectangular and triangular profile was investigated [5][6][7]. A conclusion was made about the existence of a unique solution for the two-parametric inverse problem.…”