1999
DOI: 10.1117/12.355021
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<title>Inverse problem of heterodyne differential microscope for steplike object</title>

Abstract: The solution of inverse problem of heterodyne differential microscope based on representation of linear part of microscope response by moments of object function is realized. The parameters of step-like object was determined with superresolution.

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(7 citation statements)
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“…Recall that our method is based on photometry of surface profiles, in which a sampling of brightness levels in a discrete set of points is carried out, followed by conversion into digital form [12,13]. The obtained data (optical response) are digitally processed in order to determine the characteristics and parameters (including statistical ones) characterizing the properties of the investigated surface [12][13][14][15]. As a result, from the digitized distribution of the intensity of the light scattered by the surface, one can find, for example, the form of the approximating ACFs, and also determine the corresponding statistical parameters of the roughness of the profiles of the studied surface: the standard deviation and the correlation radius (see details in [9][10][11][12][13]).…”
Section: Photometric Analysis Of the Jiaguwen Examplementioning
confidence: 99%
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“…Recall that our method is based on photometry of surface profiles, in which a sampling of brightness levels in a discrete set of points is carried out, followed by conversion into digital form [12,13]. The obtained data (optical response) are digitally processed in order to determine the characteristics and parameters (including statistical ones) characterizing the properties of the investigated surface [12][13][14][15]. As a result, from the digitized distribution of the intensity of the light scattered by the surface, one can find, for example, the form of the approximating ACFs, and also determine the corresponding statistical parameters of the roughness of the profiles of the studied surface: the standard deviation and the correlation radius (see details in [9][10][11][12][13]).…”
Section: Photometric Analysis Of the Jiaguwen Examplementioning
confidence: 99%
“…The mathematical model of the groove in the optical range of wavelengths can be described by the following expression (see e.g. [14]):…”
Section: The Mathematical Model Of the Groove Scalar Scatteringmentioning
confidence: 99%
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