We investigate the properties of high-Q, wide freespectral-range semiconductor microcavity ring and disk resonators coupled to submicron-width waveguides. Key optical design parameters are characterized using finite-difference timedomain (FDTD) solutions of the full-wave Maxwell's equations. We report coupling efficiencies and resonant frequencies that include the effects of waveguide dispersion and bending and scattering losses. For diameters of 5 m, the microcavity resonators can have Q's in the several thousands and a free spectral range of 6 THz (50 nm) in the 1.55 m, wavelength range. Studies of the transmittance characteristics illustrate the transition from singlemode resonances to whispering-gallery-mode resonances as the waveguide width of the microring is increased to form a solid microdisk. We present nanofabrication results and experimentally measured transmission resonances of AlGaAs/GaAs microcavity resonators designed in part with this method.
We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.
We report the measurement of cavity propagation losses in nearly single-mode semiconductor waveguide-coupled ring and disk microcavity optical resonators. Using a novel 10.5-m-diameter ring resonator, we measure transverse electric (TE) and transverse magnetic (TM) field intensity losses in 0.35-m-wide ring waveguide cavities in the 1.55-m-wavelength region. We present the experimental results for nanofabricated AlGaAs/GaAs 10.5-m-diameter ring and disk resonators to quantify cavity losses and to show the feasibility of these promising and robust submicron-scale devices.
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