1997
DOI: 10.1364/ol.22.001244
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Waveguide-coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and 216-nm free spectral range

Abstract: We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.

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Cited by 222 publications
(86 citation statements)
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“…Planar integration of WGMRs with waveguides is deemed to be the most practical approach [184][185][186][187][188][189][190][191][192]. For example, strip-line pedestal antiresonant reflecting waveguides have been utilized for robust coupling to microsphere resonators as well as to photonic circuits [193][194][195][196].…”
Section: Coupling Loss and Quality Factorsmentioning
confidence: 99%
“…Planar integration of WGMRs with waveguides is deemed to be the most practical approach [184][185][186][187][188][189][190][191][192]. For example, strip-line pedestal antiresonant reflecting waveguides have been utilized for robust coupling to microsphere resonators as well as to photonic circuits [193][194][195][196].…”
Section: Coupling Loss and Quality Factorsmentioning
confidence: 99%
“…6,7 Such resonators can be designed as notch filters for adding or dropping individual channels in the telecommunication bands and can be densely integrated in photonic networks. For reconfigurable DWDM systems, and to compensate for temperature changes, it is desirable to tune the precise channel frequency dropped by such resonator add/drop multiplexers.…”
mentioning
confidence: 99%
“…[12]. The wafer structure with a 0.4pm -thick InGaAsP ( 2 g = 1.2 4 urm) guiding layer is grown on an InP substrate by molecular-beam epitaxy [ Figure 9(left)].…”
Section: Design and Fabricationmentioning
confidence: 99%