A key requirement for fabrication of organic light emitting diode (OLED) displays is uniform film deposition over large areas because of the sensitivity of emission color and efficiency on film thickness. Conventional deposition using point sources is unattractive because of the requirement of a large source to substrate separation, usually with substrate rotation, to achieve acceptable thin film uniformity. By translating a novel extended linear evaporation source in a single direction, film nonuniformity of less than 5% has been demonstrated over a 300 mm x 400 mm substrate with a source to substrate separation of 100 mm.OLEDs with all organic layers deposited using linear sources have been determined to operate identically to devices fabricated using conventional point sources. The performance of doped and undoped devices as well as the advantages of linear source deposition over conventional deposition techniques will be described.
A low rf nitrogen plasma source was used to treat poly͑ethylene-2, 6-naphthalate͒ web material. Nitrogen uptake, the N 1s centroid, the N 1s peak width, rearrangement of the ester ͑from the O 1s spectrum͒, and oxygen level were measured using x-ray photoelectron spectroscopy as a function of treatment time at several treatment conditions. The observed changes in surface chemistry with treatment time are roughly consistent with a dose response having a linear regime at low doses and a saturation regime at high doses ͑where dose is power/width/web speed͒. Hence, to a first approximation, the flux densities ͑to the web͒ of relevant species scale with power. As the dose increases, the distribution of nitrogen groups formed broadens and shifts toward higher N 1s binding energy, suggesting that a larger fraction of the nitrogen-containing species are amines at low doses and amides at higher doses. The breadth of the distribution of nitrogen-containing species appears to be strongly correlated with the amount of nitrogen incorporated in the PEN surface. A surface sites model was applied to the measured nitrogen uptake as a function of treatment time. Phenomenological nitrogen incorporation and loss terms were determined in the context of this model. Both terms increase with treatment power and treatment pressure. The ratio, however, varies to a much smaller degree as a function of process conditions, with high powers and pressures giving the highest ratio. Further elucidation of the incorporation and loss processes should be possible with plasma diagnostic data related to species concentrations.
This paper will discuss how the unit manufacturing cost of AMOLED displays can be reduced by as much as 40% through the use of a flash vaporization source first presented at SID 2006. This cost reduction is achieved principally through higher materials utilization and higher productivity.
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