2001
DOI: 10.1016/s0894-1777(01)00040-1
|View full text |Cite
|
Sign up to set email alerts
|

Experimental and numerical investigation of a capacitively coupled low-radio frequency nitrogen plasma

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

1
8
0

Year Published

2005
2005
2021
2021

Publication Types

Select...
4
2

Relationship

0
6

Authors

Journals

citations
Cited by 18 publications
(9 citation statements)
references
References 26 publications
1
8
0
Order By: Relevance
“…Characteristic emissions from neutral and ionized molecular nitrogen were found and attributed to the second positive and first negative system of molecular nitrogen, respectively (Table 1). 14, 15 The values were nearly identical to the results published by Conti et al for a 40 kHz nitrogen plasma 7…”
Section: Resultssupporting
confidence: 83%
See 2 more Smart Citations
“…Characteristic emissions from neutral and ionized molecular nitrogen were found and attributed to the second positive and first negative system of molecular nitrogen, respectively (Table 1). 14, 15 The values were nearly identical to the results published by Conti et al for a 40 kHz nitrogen plasma 7…”
Section: Resultssupporting
confidence: 83%
“…However, the presence of very reactive N + ions as evidenced by the emission line at 399.75 nm, is indicative of the existence of high energy electrons or photons (VUV photons), which are able to cleave N 2 into atomic nitrogen, a process that requires more than 9.8 eV. Conti et al analyzed the formation of different electron species in the low‐RF, capacitively coupled nitrogen plasma 7. There, the major part of the electrons is in the plasma bulk and they are characterized by a very low energy of 0.5 eV.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…It is can be seen that NII has many more strong emission lines in the visible range than does NI. Furthermore, nitrogen-discharge experiments [31] show that the optical emission spectrum in the visible and UV regions, is quite complex with multiple-peaks and many blended lines.…”
Section: G Nitrogenmentioning
confidence: 99%
“…Free radicals created can further react with reactive species in the gas phase [6,7]. Subsequently, a surface reacting with active nitrogen such as N 2 + and N 2 * [8] can react with other molecules such as metals [9,10], macromolecules [11] and so on. Nitrogen plasma can give rise to amine (-NH 2 ), imine (-CH=NH), cyano (-CN) and amide (-CO-NH) groups [12].…”
Section: Introductionmentioning
confidence: 99%