Resistance fluctations in submicrometer narrow Si inversion layers are studied over a wide range of temperatures and electron concentrations. Thermally activated switching on and off of discrete resistance increments is observed, caused by the capture and emission of individual electrons at strategically located scatterers (interface traps). The traps have a broad distribution of activation energies, as assumed in accounting for 1/f noise in larger devices.
We combine photonic and electronic band structure engineering to create a surface-emitting quantum cascade microcavity laser. A high-index contrast two-dimensional photonic crystal is used to form a micro-resonator that simultaneously provides feedback for laser action and diffracts light vertically from the surface of the semiconductor surface. A top metallic contact allows electrical current injection and provides vertical optical confinement through a bound surface plasmon wave. The miniaturization and tailorable emission properties of this design are potentially important for sensing applications, while electrical pumping can allow new studies of photonic crystal and surface plasmon structures in nonlinear and near-field optics.
In this the 50th anniversary year of the AVS and the AVS Symposium, this article is offered as one in a series of topical review articles to celebrate the role of this community to the progress in nanofabrication technology. The emphasis of the article is on the principles and limits of the various pattern formation techniques which have emerged as important tools in the research of nanoscale devices and structures. Topics such as e-beam lithography, proximal probes, imprint lithography, self assembly, and directed assembly are all discussed.
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