Electronic and structural properties of doped amorphous and nanocrystalline silicon deposited at low substrate temperatures by radio-frequency plasma-enhanced chemical vapor deposition Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition
Hard and transparent diamondlike carbon (DLC) films have been prepared on room-temperature substrates by using a C2H2–Ar plasma immersion ion processing (PIIP) method. The optical properties of the DLC films with different thicknesses deposited on PMMA (polymethyl methacrylate), silicon wafers, and glass plates were systematically examined. It was found that careful control of substrate bias voltage was needed for favorable growth of DLC films with low atomic hydrogen content, high hardness and wear resistance, and excellent optical properties. The resultant DLC films exhibited a low friction coefficient, high optical gap energy, and very high optical transmittance both in infrared and visible light ranges. The study confirmed that C2H2–Ar PIIP with low negative bias voltages and suitable C2H2/Ar gas ratios can produce optically transparent and hard DLC films on optical materials.
Fluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.
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