Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

Abstract

Fluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

Ultra‐low friction of fluorine‐doped hydrogenated carbon film with curved graphitic structure

“…Various mechanisms have been proposed to explain the friction and wear behaviors of fluorinated carbon films. Alpas investigated the material transfer mechanisms between aluminum and fluorinated carbon interfaces and indicated that the formation of AlF x is the main reason of the low coefficient of friction, but in other researches, the coefficient of frictions for fluorinated carbon films tested against steel surface and Si 3 N 4 in air were also low . Miyamoto investigated the tribological properties of the fluorinated carbon films by molecular dynamics and quantum chemical calculation and concluded that the general low coefficient of friction of fluorinated carbon films was mainly attributed to the high chemical inertness of the fluorinated carbon films by fluorine passivating the surface dangling bonds; the friction coefficient of the fluorinate‐terminated diamond carbon film was obtained to be 0.07.…”