We experimentally investigate the performance of a nonlinear parametrically driven mass sensor in the presence of detection noise. Mass detection is achieved by measuring the amount of methanol vapor adsorption on the sensor. To demonstrate the advantage of parametric sensing in counteracting the influence of detection noise, we operate the sensor in both the parametric and harmonic resonance mode. Comparison of the results shows that in contrast to conventional linear harmonic sensing, the detection sensitivity does not deteriorate for the parametric case when a tenfold increase in detection noise is introduced. Furthermore, we demonstrate additional functionality of the parametric sensor by utilizing it as a threshold detector, whose performance remains the same despite the added detection noise. Taken together, these results suggest that for mass detection in the presence of detection noise, a parametrically operated sensor may offer better performance over one operated harmonically in the linear regime.
Demonstrated are 1060 nm microelectromechanical-systems-based tunable vertical-cavity surfaceemitting lasers (MEMS-VCSELs) with a 100 nm continuous tuning range under repetitively scanned operation at rates beyond 500 kHz and a 90 nm continuous tuning range under static operation. These devices employ a thin strained InGaAs multiple quantum well active region integrated with a fully oxidised GaAs/Al x O y bottom mirror and a suspended dielectric top mirror. The devices are optically pumped via 850 nm light. These ultra-widely tunable lasers represent the first MEMS-VCSELs reported in this wavelength range, and are ideally suited for application in ophthalmic swept-source optical coherence tomography.
In this paper, we present a 1050 nm electrically-pumped micro-electro-mechanically-tunable vertical-cavity-surface-emitting-laser (MEMS-VCSEL) with a record dynamic tuning bandwidth of 63.8 nm, suitable for swept source optical coherence tomography (SS-OCT) imaging. These devices provide reduced cost & complexity relative to previously demonstrated optically pumped devices by obviating the need for a pump laser and associated hardware. We demonstrate ophthalmic SS-OCT imaging with the electrically-pumped MEMS-VCSEL at a 400 kHz axial scan rate for wide field imaging of the in vivo human retina over a 12 mm × 12 mm field and for OCT angiography of the macula over 6 mm × 6 mm & 3 mm × 3 mm fields to show retinal vasculature and capillary structure near the fovea. These results demonstrate the feasibility of electrically pumped MEMS-VCSELs in ophthalmic instrumentation, the largest clinical application of OCT. In addition, we estimate that the 3 dB coherence length in air is 225 meters ± 51 meters, far greater than required for ophthalmic SS-OCT and suggestive of other distance ranging applications.
Resonant microelectromechanical systems are key building blocks for many microsensor applications, including mass detection, inertial detection and RF filters and timing oscillators.Especially in systems with low damping, amplitudes are such that nonlinearities are present. In many applications, these nonlinearities can be significant, and need to be accounted for. In this paper, mass sensing of DNT will be discussed in the context of an application where understanding and cleverly utilizing nonlinearity results in improved sensor performance.
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