Robust micro-rate sensor actuated by parametric resonance

Oropeza-Ramos, Laura; Burgner, Christopher; Turner, Kimberly L.

doi:10.1016/j.sna.2009.03.010

Cited by 64 publications

(48 citation statements)

References 13 publications

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“…Now, some assumptions will be applied for simplifying Eq. Actuating force is of the following form [5,21]:…”

Section: Determining the Dynamical Equations Of Gyroscopementioning

confidence: 99%

“…This idea was rst published by Oropeza-Ramos in 2005 and the result was shown with numerical simulation [17]. After that, in [5,18], the operating speci cations of a parametrically excited gyroscope were reported. In Pakniyat's works [19,20] some parametric study and stability analysis for di erent parameters of the gyroscope were done.…”

Section: Introductionmentioning

confidence: 99%

“…MEMS gyros are mainly used in vehicle industries; navigation systems of airplanes, especially low-cost drones; stability control of cars; robotics; biomechanics; and rollover detection of vehicles [1][2][3][4][5][6]. Di erent types of MEMS gyros are tuning fork [1,3,[7][8][9][10], proof mass [1], and ring gyroscopes [1,3,10].…”

Section: Introductionmentioning

confidence: 99%

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Parameter identification of a parametrically excited rate micro-gyroscope using recursive least squares method

Mohammadi

Salarieh

2017

Scientia Iranica

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Abstract. Estimation of physical parameters of a parametrically excited gyroscope is studied in this paper. This estimation is possible by reading the input and output data of the gyroscope. Because of di erent faults in the manufacturing process and tolerances, physical parameters of a gyroscope are not exactly same as the expected values of the manufacturer. Moreover, changing of temperature, humidity, external acceleration, etc. can change the physical parameters of the gyro. Thus, the physical parameters of gyroscope are not xed values and may deviate from the desired designed values. The physical parameters of gyroscope determine the optimal region for working of gyroscope. Thus, if the parameters deviate from the original ones but the excitation frequency is xed at its initial value, the sensitivity of the gyroscope will be reduced. The new parameters of the gyroscope can determine the new point of excitation frequency and, because of this, estimation of these parameters should be done to prevent sensitivity reduction. Estimation of these new parameters using the input and output values is studied here.

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“…Now, some assumptions will be applied for simplifying Eq. Actuating force is of the following form [5,21]:…”

Section: Determining the Dynamical Equations Of Gyroscopementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Parameter identification of a parametrically excited rate micro-gyroscope using recursive least squares method

Mohammadi

Salarieh

2017

Scientia Iranica

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“…The idea of employing parametric resonance was first proposed by Oropeza-Ramos et al [14]. Since parametric excitation can be applied only by replacement of interdigitated comb fingers by noninterdigitated ones [14][15][16][17][18][19], parametric resonance does not impose extra financial burden on the fabrication of the gyroscope. In addition, parametric resonance is robust to parameter changes and hence, such a gyroscope does not require post-manufacturing tunings.…”

Section: Introductionmentioning

confidence: 99%

Stability analysis of a new class of MEMS gyroscopes with parametric resonance

2012

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In this paper, a parametrically resonated MEMS gyroscope is considered, and the effect of its parameters on the system stability is studied. Unlike the general case of MEMS gyroscopes with harmonic excitation, in this new class of gyroscopes with parametric excitation, the origin is one stationary point of the system. The study starts with the stability analysis of the origin, and then it goes on to analyze the effect of each parameter on the stability of periodic orbits. Stabilities are studied by means of Floquet theory. As the results indicate, presence of a non-trivial response for the system is closely interconnected to the stabilities (and instabilities) of the system. It is demonstrated that the stability of the origin always contributes to a zero response for the sensor, and hence the instability of origin is required for the occurrence of parametric resonance. In contrast, stability of a periodic orbit does not necessarily guarantee a resonant response for the gyroscope, and again it is the instability of the origin which is required for this purpose. Because in the case of linear stiffness-linear parametric excitation the instability of the origin results in instability of the system, it is concluded that nonlinearities are required for a parametrically actuated gyroscope.

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“…In [7] a MEMS energy harvesting device excited by mechanical vibration was characterized with spring-hardening effect creating an extension of 27 Hz. In [8] parametric resonance was exploited to show that the spring-hardening effect can extend the resonance curve up to 1 kHz. In this work, we show a laterally driven comb-drive resonator that can, a) extend its hysteresis range, and b) maintain its high amplitude vibration under proper excitation conditions.…”

Section: Introductionmentioning

confidence: 99%

Characterization of a MEMS resonator with extended hysteresis

Naik

Hikihara

2011

IEICE Electron. Express

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Abstract:In this paper an electrostatically driven MEMS resonator with resonance and hysteresis characteristics is reported. The resonator begins to exhibit spring-hardening effect at ac excitation voltage of 105 mV and dc bias voltage of 5 V in vacuum at 50 Pa. An extended hysteresis at low pressure and high excitation voltage during upsweep and downsweep of excitation frequency was observed. This characteristic facilitates the usage of this type of resonator in a range of applications such as a cascaded filter array or as a high bandwidth resonator.

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Robust micro-rate sensor actuated by parametric resonance

Cited by 64 publications

References 13 publications

Parameter identification of a parametrically excited rate micro-gyroscope using recursive least squares method

Parameter identification of a parametrically excited rate micro-gyroscope using recursive least squares method

Stability analysis of a new class of MEMS gyroscopes with parametric resonance

Characterization of a MEMS resonator with extended hysteresis

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