We experimentally investigate the performance of a nonlinear parametrically driven mass sensor in the presence of detection noise. Mass detection is achieved by measuring the amount of methanol vapor adsorption on the sensor. To demonstrate the advantage of parametric sensing in counteracting the influence of detection noise, we operate the sensor in both the parametric and harmonic resonance mode. Comparison of the results shows that in contrast to conventional linear harmonic sensing, the detection sensitivity does not deteriorate for the parametric case when a tenfold increase in detection noise is introduced. Furthermore, we demonstrate additional functionality of the parametric sensor by utilizing it as a threshold detector, whose performance remains the same despite the added detection noise. Taken together, these results suggest that for mass detection in the presence of detection noise, a parametrically operated sensor may offer better performance over one operated harmonically in the linear regime.
Resonant microelectromechanical systems are key building blocks for many microsensor applications, including mass detection, inertial detection and RF filters and timing oscillators.Especially in systems with low damping, amplitudes are such that nonlinearities are present. In many applications, these nonlinearities can be significant, and need to be accounted for. In this paper, mass sensing of DNT will be discussed in the context of an application where understanding and cleverly utilizing nonlinearity results in improved sensor performance.
We demonstrate parametric amplification of a multidegree of freedom resonant mass sensing array via an applied base motion containing the appropriate frequency content and phases. Applying parametric forcing in this manner is simple and aligns naturally with the vibrational properties of the sensing structure. Using this technique, we observe an increase in the quality factors of the coupled array resonances, which provides an effective means of improving device sensitivity.
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