A: The NanoXCT EU FP7 project [1] aims at developing a laboratory, i.e. bench top sized X-ray nano-CT system with a large field-of-view (FOV) for non-destructive testing needs in the micro-and nano-technology sector. The targeted voxel size is 50 nm at 0.175 mm FOV, the maximum FOV is 1 mm at 285 nm voxel size. Within the project a suitable X-ray source, detector and manipulation system have been developed.The system concept [2] omits the use of X-ray optics, to be able to provide a large FOV of up to 1 mm and to preserve the flexibility of state-of-the-art micro-CT systems. The targeted resolution will be reached via direct geometric magnification made possible by the development of a specialized high-flux nano-focus transmission X-ray tube. The end-user's demand for elemental analysis will be covered by energy-resolved measurement techniques, in particular a K-edge imaging method.Timepix [3] modules were chosen as the basis for the detector system, since a photon counting detector is advantageous for the long exposure times that come with very small focal spot sizes.
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