NanoXCT: development of a laboratory nano-CT system

Nachtrab, F.; Firsching, Markus; Uhlmann, Norman; Speier, C.; Takman, Per; Tuohimaa, Tomi; Heinzl, Christoph; Kastner, Johann; Larsson, Daniel H.; Holmberg, Anders; Berti, G.; Krumm, M.; Sauerwein, C.

doi:10.1117/12.2061752

Cited by 9 publications

(8 citation statements)

References 6 publications

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“…Collecting a set of many radiographs at different rotation angles and applying numerical models allow a 3D representation of the object to be reconstructed. The X‐ray CNT was performed using FEI TM QUANTA 450 FEG (Hillsboro) with built‐in GATAN (Pleasanton, CA, USA) module that enabled X‐rays to be generated (Sasov, ; Pauwels et al ., ; Nachtrab et al ., ). A 30 kV electron beam was targeted onto a tungsten block at 45°.…”

Section: Methodsmentioning

confidence: 97%

3D correlative morphological and elemental characterization of materials at the deep submicrometre scale

Priebe

Goret

Bleuet

et al. 2016

Journal of Microscopy

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This paper shows how X-ray computed nanotomography (CNT) can be correlated with focused ion beam time-of-flight secondary ion mass spectrometry (FIB-TOF-SIMS) tomography on the same sample to investigate both the morphological and elemental structure. This methodology is applicable to relatively large specimens with dimensions of several tens of microns whilst maintaining a high spatial resolution of the order of 100 nm. However, combining X-ray CNT and FIB-TOF-SIMS tomography requires innovative sample preparation protocols to allow both experiments to be conducted on exactly the same sample without chemically or structurally modifying the sample between measurements. Moreover, dedicated algorithms have been developed for effective data fusion that is biased with nine degrees of freedom. This methodology has been tested using a porous and heterogeneous solid oxide fuel cell (SOFC) that has features varying in size by three orders of magnitude - from hundreds of nanometre large pores and grains to tens of micron wide functional layers.

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Section: Methodsmentioning

confidence: 97%

3D correlative morphological and elemental characterization of materials at the deep submicrometre scale

Priebe

Goret

Bleuet

et al. 2016

Journal of Microscopy

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“…From our obersvations we roughly estimate a focal spot of 3 − 4 µm size for the nanotom sources whereas the Easytom source reportedly has a focal spot of ≈ 0.6 µm which would be a factor six smaller. The ntCT employs the nanotube source by the Swedish company Excillum which reaches a focal spot below 300 nm (knife edge scan) [20,21]. In terms of MTF 3D,blur Easytom and ntCT achieve 0.9 µm and 400 nm respectively.…”

Section: Technicalities Of the Source-based Scannersmentioning

confidence: 99%

Comparing image quality in phase contrast subμ X-ray tomography—A round-robin study

Zabler

Ullherr

Fella³

et al. 2020

Nuclear Instruments and Methods in Physics Research Section A:

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How to evaluate and compare image quality from different sub-micrometer (subµ) CT scans? A simple yet clever test phantom is used for recording 13 scans in a number of commercial and some non-commercial scanners. From the resulting volume images, signal and noise power spectra are modeled for estimating spatial signalto-noise ratio (SNR spectrum). Using the same data, a time-and object-independent transfer function (MTF) is computed for each scan, including phase contrast strength and spatial resolution (MTF blur ). SNR and MTF are compared to transmission measurements of the same test phantom. Making SNR object-independent by normalization with respect to the object spectrum yields detection effectiveness (DE) a new measure which reveals how technical differences as well as operator-choices strongly influence scan quality for a given measurement time. Using DE both source-based and detector-based subµ CT scanners can be studied and optimized with respect to signal detection effectiveness using the metrics which are presented in this study. Future application of

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“…In contrast, high-resolution X-ray sources equipped with thin transmission targets do not need a vacuum environment. Thus, with such a source [9,10], it is possible to design more versatile, applicable computed tomography devices with resolutions of only a few hundred nanometers [11,12], which allows for a wide variety of samples from the field of materials science in relevant sample diameters to be investigated.…”

Section: Introductionmentioning

confidence: 99%

Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

Müller

Graetz²,

Balles³

et al. 2021

Crystals

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In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.

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NanoXCT: development of a laboratory nano-CT system

Cited by 9 publications

References 6 publications

3D correlative morphological and elemental characterization of materials at the deep submicrometre scale

3D correlative morphological and elemental characterization of materials at the deep submicrometre scale

Comparing image quality in phase contrast subμ X-ray tomography—A round-robin study

Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

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