2015
DOI: 10.1088/1748-0221/10/11/c11009
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Development of a Timepix based detector for the NanoXCT project

Abstract: A: The NanoXCT EU FP7 project [1] aims at developing a laboratory, i.e. bench top sized X-ray nano-CT system with a large field-of-view (FOV) for non-destructive testing needs in the micro-and nano-technology sector. The targeted voxel size is 50 nm at 0.175 mm FOV, the maximum FOV is 1 mm at 285 nm voxel size. Within the project a suitable X-ray source, detector and manipulation system have been developed.The system concept [2] omits the use of X-ray optics, to be able to provide a large FOV of up to 1 mm an… Show more

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Cited by 11 publications
(5 citation statements)
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“…Unfortunately, a smaller source-to-sample distance could not be tested due to the shape of the resolution pattern housing. Therefore, we were unable to overcome the limitations posed by Fresnel diffraction effects and resolve structures below 200 nm, even though our nanofocus source can create X-ray spots that allow features smaller than this to be visualized in projection images (28).…”
Section: Discussionmentioning
confidence: 99%
“…Unfortunately, a smaller source-to-sample distance could not be tested due to the shape of the resolution pattern housing. Therefore, we were unable to overcome the limitations posed by Fresnel diffraction effects and resolve structures below 200 nm, even though our nanofocus source can create X-ray spots that allow features smaller than this to be visualized in projection images (28).…”
Section: Discussionmentioning
confidence: 99%
“…The in-house-constructed table-top NanoCT setup does not use any X-ray or visible light optics and is based on the principle of a shadow microscope with geometric magnification 10 . The two main components are the nanofocus X-ray source (Nanotube prototype; Excillum) 46 and a single-photon counting detector with a FOV of 1475 pixel × 195 pixel (PILATUS 300K-W 20 Hz, Dectris) 47,48 . The device can reach resolutions in the reconstructed tomography data down to 100 nm 10 .…”
Section: Methodsmentioning
confidence: 99%
“…It is based on the principle of a shadow microscope and, thereby, does not rely on X-ray or visible light optics for magnification. By combining a nanofocus X-ray source (prototype Nanotube; Excillum) [33] with a single-photon counting detector (PILATUS 300K-W 20 Hz, Dectris) [34] it reaches resolutions down to 100 nm [21]. For the presented data,1,599 projections, evenly distributed over 360°, were taken at a peak voltage of 60 kV.…”
Section: F X-ray Nanoct: Acquisitionmentioning
confidence: 99%