In this paper, synthesis of carbon and ceramic microcoils by microwave chemical vapor deposition method is presented. Carbon microcoils were synthesized over nickel catalyst using acetylene as carbon source by microwave technique. Titanium carbide microcoils were gained by direct titanization to carbon microcoils. A comparison is given between conventional thermal filament CVD and microwave CVD methods. Particular attention is given to the potential applications ofcarbon and ceramic microcoils for MEMS.

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